Optimization of High Current Xenon Plasma Ion Beams for Applications in Semiconductor Failure Analysis and Development
Source abstract
Abstract
Srinivas Subramaniam, Kevin Johnson; Optimization of High Current Xenon Plasma Ion Beams for Applications in Semiconductor Failure Analysis and Development
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Ion-surface interactions and analysis · Electron and X-Ray Spectroscopy Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References
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