DataVXMicroscopy and MicroanalysisPaper
journal article·2011-07Open access

Prospects for Atom Probe Tomography of Commercial Semiconductor Devices

D Larson, D Lawrence, D Olson, T Prosa, D Reinhard, R Ulfig, P Clifton, J Bunton, D Lenz, J Olson, L Renaud, I Martin, T Kelly

Microscopy and Microanalysis· Volume 17· Issue S2
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.
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Source: crossref · Quality: short

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Electronic materials

OpenAlex topics: Advanced Materials Characterization Techniques · Ion-surface interactions and analysis · Electron and X-Ray Spectroscopy Techniques

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