DataVXMicroscopy and MicroanalysisPaper
journal article·2015-08

A Comparative Analysis of a Si/SiGe Heterojunction-Bipolar Transistors: APT, STEM-EDX and ToF-SIMS

Robert Estivill, Pascal Chevalier, Frederic Lorut, Marc Juhel, Laurent Clement, Germain Servanton, Gregory Avenier, Adeline Grenier, Didier Blavette

Microscopy and Microanalysis· Volume 21· Issue S3
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Abstract

Robert Estivill, Pascal Chevalier, Frederic Lorut, Marc Juhel, Laurent Clement, Germain Servanton, Gregory Avenier, Adeline Grenier, Didier Blavette; A Com
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Source: openalex_inverted_index · Quality: short

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OpenAlex topics: Advanced Materials Characterization Techniques · Integrated Circuits and Semiconductor Failure Analysis · Semiconductor materials and devices

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References (2)

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1. Int J Mater Res 102 · 2011 · 1074
2. 10.1080/09500839.2013.77182310.1080/09500839.2013.771823 ↗