High Energy BSE/SE/STEM Imaging of 8 um Thick Semiconductor Interconnects
Source abstract
Abstract
LM Gignac, C Beslin, J Gonsalves, F Stellari, C-C Lin; High Energy BSE/SE/STEM Imaging of 8 um Thick Semiconductor Interconnects, Microscopy and Microanaly
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications
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