DataVXACS Applied Materials & InterfacesPaper
journal article·2020-06-03

Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H2S Sensor at Room Temperature

Po-Yi Chang, Ching-Fu Lin, Samer El Khoury Rouphael, Ting-Hsuan Huang, Chang-Mao Wu, Dominique Berling, Ping-Hung Yeh, Chia-Jung Lu, Hsin-Fei Meng, Hsiao-Wen Zan, Olivier Soppera

ACS Applied Materials & Interfaces· Volume 12· Issue 22
Publisher page
Source abstract

Abstract

A metal-oxide material (indium zinc oxide [IZO]) device with near-infrared (NIR) laser annealing was demonstrated on both glass and bendable plastic substrates (polycarbonate, polyethylene, and polyethylene terephthalate). After only 60 s, the sheet resistance of IZO films annealed with a laser was comparable to that of thermal-annealed devices at temperatures in the range of 200-300 °C (1 h). XPS, ATR, and AFM were used to investigate the changes in the sheet resistance and correlate them to the composition and morphology of the thin film. Finally, the NIR-laser-annealed IZO films were demonstrated to be capable of detecting changes in humidity and serving as a highly sensitive gas sensor of hydrogen sulfide (in ppb concentration), with room-temperature operation on a bendable substrate.
Source: openalex_inverted_index · Quality: baseline

Research context

Ceramics & glassesMaterials processing

OpenAlex topics: Gas Sensing Nanomaterials and Sensors · Advanced Chemical Sensor Technologies · Spectroscopy and Laser Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, 1001 Ta Hsueh Road, Hsinchu 30010, Taiwan

Université de Haute-Alsace, CNRS, IS2M UMR 7361, F-68100 Mulhouse, France

Université de Strasbourg, 67081 Strasbourg, France

Department of Physics, Tamkang University, No. 151, Yingzhuan Road, Tamsui District, New Taipei City 25137, Taiwan

Department of Chemistry, National Taiwan Normal University, 162, Section 1, Heping E. Road, Taipei 106, Taiwan

Institute of Physics, National Chiao Tung University, 1001 Ta Hsueh Road, Hsinchu 30010 Taiwan

Funding

Agence Nationale de la Recherche · Ministry of Science and Technology, Taiwan · Institut Carnot MICA

References (43)

Show source-provided references
1. 10.1016/j.snb.2015.07.07010.1016/j.snb.2015.07.070 ↗
2. 10.1016/j.apsusc.2016.08.12110.1016/j.apsusc.2016.08.121 ↗
3. 10.1021/ar400070m10.1021/ar400070m ↗
4. 10.1164/rccm.200409-1184OC10.1164/rccm.200409-1184OC ↗
5. 10.1021/acssensors.7b0056410.1021/acssensors.7b00564 ↗
6. 10.1088/1361-6528/aaf7cb10.1088/1361-6528/aaf7cb ↗
7. 10.1016/j.snb.2004.11.05410.1016/j.snb.2004.11.054 ↗
8. 10.1021/acssensors.6b0082910.1021/acssensors.6b00829 ↗
9. 10.1002/adfm.20150054510.1002/adfm.201500545 ↗
10. 10.1016/j.snb.2016.06.04210.1016/j.snb.2016.06.042 ↗
11. 10.1002/adma.20140429610.1002/adma.201404296 ↗
12. 10.1002/adma.20150645710.1002/adma.201506457 ↗
13. 10.1039/C6RA13876D10.1039/C6RA13876D ↗
14. 10.1016/j.ceramint.2015.12.17610.1016/j.ceramint.2015.12.176 ↗
15. 10.1021/acsami.7b0925110.1021/acsami.7b09251 ↗
16. 10.1038/srep1107010.1038/srep11070 ↗
17. 10.1016/j.snb.2017.11.08110.1016/j.snb.2017.11.081 ↗
18. 10.1063/1.360148810.1063/1.3601488 ↗
19. 10.1021/acsami.6b0572410.1021/acsami.6b05724 ↗
20. 10.1038/s41598-018-28196-110.1038/s41598-018-28196-1 ↗
21. 10.1038/srep1041010.1038/srep10410 ↗
22. 10.1039/C3TC31326C10.1039/C3TC31326C ↗
23. 10.1038/srep1049010.1038/srep10490 ↗
24. 10.1039/C6TC05201K10.1039/C6TC05201K ↗
25. Breaban F. · Lasers Eng. · 2015 · 30 · 1
26. 10.1016/0924-0136(94)90078-710.1016/0924-0136(94)90078-7 ↗
27. 10.3109/14764172.2016.115735610.3109/14764172.2016.1157356 ↗
28. 10.1002/mame.20190040210.1002/mame.201900402 ↗
29. 10.1016/j.snb.2014.12.08610.1016/j.snb.2014.12.086 ↗
30. 10.1016/j.snb.2014.04.04110.1016/j.snb.2014.04.041 ↗
31. 10.1039/C6RA20710C10.1039/C6RA20710C ↗
32. 10.1021/ac60068a00710.1021/ac60068a007 ↗
33. 10.1016/0925-4005(94)01268-M10.1016/0925-4005(94)01268-M ↗
34. 10.3390/s10030208810.3390/s100302088 ↗
35. 10.1016/j.snb.2012.02.07610.1016/j.snb.2012.02.076 ↗
36. 10.1039/C4TC00667D10.1039/C4TC00667D ↗
37. 10.1016/j.snb.2013.05.07310.1016/j.snb.2013.05.073 ↗
38. 10.1063/1.11132610.1063/1.111326 ↗
39. 10.1016/j.snb.2005.04.03510.1016/j.snb.2005.04.035 ↗
40. 10.1021/acsami.6b0289310.1021/acsami.6b02893 ↗
41. 10.1021/acsami.5b1285710.1021/acsami.5b12857 ↗
42. 10.1021/acsami.7b0706910.1021/acsami.7b07069 ↗
43. 10.1021/acsami.8b0058810.1021/acsami.8b00588 ↗