DataVXACS Applied Materials & InterfacesPaper
journal article·2021-03-17Open access

Size-Controlled Spalling of LaAlO3/SrTiO3 Micromembranes

Rasmus T. Dahm, Ricci Erlandsen, Felix Trier, Alessia Sambri, Emiliano Di Gennaro, Anita Guarino, Lukas Stampfer, Dennis V. Christensen, Fabio Miletto Granozio, Thomas S. Jespersen

ACS Applied Materials & Interfaces· Volume 13· Issue 10
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Source abstract

Abstract

The ability to form freestanding oxide membranes of nanoscale thickness is of great interest for enabling material functionality and for integrating oxides in flexible electronic and photonic technologies. Recently, a route has been demonstrated for forming conducting heterostructure membranes of LaAlO3 and SrTiO3, the canonical system for oxide electronics. In this route, the epitaxial growth of LaAlO3 on SrTiO3 resulted in a strained state that relaxed by producing freestanding membranes with random sizes and locations. Here, we extend the method to enable self-formed LaAlO3/SrTiO3 micromembranes with control over membrane position, their lateral sizes from 2 to 20 μm, and with controlled transfer to other substrates of choice. This method opens up the possibility to study and use the two-dimensional electron gas in LaAlO3/SrTiO3 membranes for advanced device concepts.
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Research context

Nanomaterials

OpenAlex topics: Electronic and Structural Properties of Oxides · Ferroelectric and Negative Capacitance Devices · Semiconductor materials and devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Center for Quantum Devices, Niels Bohr Institute, University of Copenhagen, Universitetsparken 5, 2100 Copenhagen, Denmark

Department of Energy Conversion and Storage, Technical University of Denmark, Fysikvej, Building 310, 2800 Kgs. Lyngby, Denmark

CNR-SPIN, Complesso Universitario di Monte S. Angelo, Via Cintia, 80126 Naples, Italy

Dipartimento di Fisica “E. Pancini”, Compl. Univ. di Monte S. Angelo, Università di Napoli “Federico II”, Via Cintia, 80126 Napoli, Italy

Department of Physical Sciences and Technologies of Matter, CNR-DSFTM NFFA Trieste Area Science Park, Basovizza Strada Statale 14, 34149 Trieste, Italy

Funding

Ministero dell’Istruzione, dell’Università e della Ricerca · Det Frie Forskningsråd · Villum Fonden · Horizon 2020 Framework Programme

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