Surface Engineering of Metal–Organic Framework Prepared on Film Bulk Acoustic Resonator for Vapor Detection

Gravimetric resonators based on micro/nanoelectromechanical systems (M/NEMS) are potential candidates in developing smaller, less expensive, and higher-performance gas sensors. Metal–organic frameworks (MOFs) with high surface areas have recently come into focus as advanced nanoporous sensitive materials in microgravimetric gas sensors. The surface of MOFs on those sensors is critical in offering water stability and varying absorption behaviors. However, the influences of the surface on sensing performance are less explored and the strategy to tune surface properties of MOFs mounted on gravimetric resonators is still rare. In this paper, a straightforward strategy to engineer surface properties of MOFs, specifically Cu3(benzenetricarboxylate)2 (known as HKUST-1), is reported and the surface hydrophilicity/hydrophobicity of HKUST-1 is tuned by chemical vapor deposition combined with monolayer self-assembly. It was found that the hybrid inorganic and organic surface engineering strategy not only preserves the absorption capacity of inner MOFs but also significantly enhances the sensor’s stability toward water.