Infrared Plasmonics with Conductive Ternary Nitrides

Conductive transition metal nitrides are emerging as promising alternative plasmonic materials that are refractory and CMOS-compatible. In this work, we show that ternary transition metal nitrides of the B1 structure and consisting of a combination of group-IVb transition metal, such as Ti or Zr, and group III (Sc, Y, Al) or group II (Mg, Ca) elements can have tunable plasmonic activity in the infrared range in contrast to Ta-based ternary nitrides, which exhibit plasmonic performance in the visible and UV ranges. We consider the intrinsic quality factors of surface plasmon polariton for the ternary nitrides, and we calculate the dispersion of surface plasmon polariton and the field enhancement at the vicinity of nitride/silica interfaces. Based on these calculations, it is shown that among these nitrides the most promising are Ti x Sc 1– x N and Ti x Mg 1– x N. In particular, Ti x Sc 1– x N can have plasmonic activity in the usual telecom bands at 850, 1300, and 1550 nm. Still, these nitrides exhibit substantial electronic losses mostly due to fine crystalline grains that deteriorate the plasmonic field enhancement. This unequivocally calls for improved growth processes that would enable the fabrication of such ternary nitrides of high crystallinity.