Purification of Nanoscale Electron-Beam-Induced Platinum Deposits via a Pulsed Laser-Induced Oxidation Reaction
Source abstract
Abstract
Platinum-carbon deposits made via electron-beam-induced deposition were purified via a pulsed laser-induced oxidation reaction and erosion of the amorphous carbon to form pure platinum. Purification proceeds from the top down and is likely catalytically facilitated via the evolving platinum layer. Thermal simulations suggest a temperature threshold of ∼485 K, and the purification rate is a function of the PtC5 thickness (80-360 nm) and laser pulse width (1-100 μs) in the ranges studied. The thickness dependence is attributed to the ∼235 nm penetration depth of the PtC5 composite at the laser wavelength, and the pulse-width dependence is attributed to the increased temperatures achieved at longer pulse widths. Remarkably fast purification is realized at cumulative laser exposure times of less than 1 s.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Ion-surface interactions and analysis · Laser-induced spectroscopy and plasma
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Materials Science and Engineering Department, University of Tennessee, Knoxville, Tennessee 37996, United States
Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37381, United States
Department of Mechanical and Aerospace Engineering, Utah State University, Logan, Utah 84322, United States
Institute for Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
Funding
Air Force Office of Scientific Research · Intel Corporation · University of Tennessee · Austrian Cooperative Research
References (56)
Show source-provided references
1. Botman A. · Nanotechnology · 2009 · 20 · 37200110.1088/0957-4484/20/37/372001 ↗
2. Randolph S. J. · Crit. Rev. Solid State Mater. Sci. · 2006 · 31 · 5510.1080/10408430600930438 ↗
3. Utke I. · 2012
4. Utke I. · J. Vac. Sci. Technol. B · 2007 · 25 · 221910.1116/1.2789441 ↗
5. Smith D. A. · Small · 2008 · 4 · 138210.1002/smll.200701133 ↗
6. Fowlkes J. D. · ACS Nano · 2010 · 4 · 161910.1021/nn901363a ↗
7. Rykaczewski K. · J. Appl. Phys. · 2007 · 101 · 05430710.1063/1.2437065 ↗
8. Toth M. · J. Appl. Phys. · 2007 · 101 · 05430910.1063/1.2437667 ↗
9. Utke I. · Appl. Phys. Lett. · 2002 · 80 · 479210.1063/1.1489097 ↗
10. Noh J. H. · Nanotechnology · 2010 · 21 · 36530210.1088/0957-4484/21/36/365302 ↗
11. Serrano-Ramon L. · ACS Nano · 2011 · 5 · 778110.1021/nn201517r ↗
12. Gavagnin M. · ACS Nano · 2013 · 7 · 77710.1021/nn305079a ↗
13. Choo H. · Nat. Photonics · 2012 · 6 · 83710.1038/nphoton.2012.277 ↗
14. Utke I. · Nanoscale · 2011 · 3 · 271810.1039/c1nr10047e ↗
15. Koops H. W. P. · J. Vac. Sci. Technol. B · 1996 · 14 · 410510.1116/1.588600 ↗
16. Yang X. · Appl. Phys. Lett. · 2005 · 86 · 18310610.1063/1.1922568 ↗
17. Kolb F. · Nanotechnology · 2013 · 24 · 30550110.1088/0957-4484/24/30/305501 ↗
18. Schwalb C. H. · Sensors · 2010 · 10 · 984710.3390/s101109847 ↗
19. Guan Y. F. · Nanotechnology · 2008 · 19 · 50530210.1088/0957-4484/19/50/505302 ↗
20. Mackus A. J. M. · J. Phys. Chem. C · 2013 · 117 · 1078810.1021/jp402260j ↗
21. Rykaczewski K. · ACS Appl. Mater. Interfaces · 2010 · 2 · 96910.1021/am1000773 ↗
22. Seki Y. · Microelectron. Eng. · 2009 · 86 · 94510.1016/j.mee.2009.01.013 ↗
23. Lassiter M. G. · J. Vac. Sci. Technol. B · 2008 · 26 · 96310.1116/1.2917076 ↗
24. Liang T. · J. Vac. Sci. Technol. B · 2005 · 23 · 310110.1116/1.2062428 ↗
25. 10.1007/s00339-014-8745-010.1007/s00339-014-8745-0 ↗
26. Bret T. · J. Vac. Sci. Technol. B · 2009 · 27 · 272710.1116/1.3243208 ↗
27. Makise K. · Sci. Rep. · 2014 · 4 · 574010.1038/srep05740 ↗
28. Winhold M. · Appl. Phys. Lett. · 2014 · 105 · 16260310.1063/1.4898819 ↗
29. Brintlinger T. · J. Vac. Sci. Technol. B · 2005 · 23 · 317410.1116/1.2130355 ↗
30. Botman A. · Microelectron. Eng. · 2008 · 85 · 113910.1016/j.mee.2007.12.036 ↗
31. Plank H. · Nanotechnology · 2008 · 19 · 48530210.1088/0957-4484/19/48/485302 ↗
32. Gopal V. · Nano Lett. · 2004 · 4 · 205910.1021/nl0492133 ↗
33. Botman A. · Nanotechnology · 2006 · 17 · 377910.1088/0957-4484/17/15/028 ↗
34. Langford R. M. · Microelectron. Eng. · 2007 · 84 · 78410.1016/j.mee.2007.01.055 ↗
35. Stark T. J. · J. Vac. Sci. Technol. B · 1992 · 10 · 268510.1116/1.586026 ↗
36. Klein K. L. · Nanotechnology · 2008 · 19 · 34570510.1088/0957-4484/19/34/345705 ↗
37. Fernandez-Pacheco A. · J. Phys. D: Appl. Phys. · 2009 · 42 · 05500510.1088/0022-3727/42/5/055005 ↗
38. Tseng A. A. · 200810.1142/6276 ↗
39. Langford R. M. · Microsc. Microanal. · 2004 · 10 · 112210.1017/S1431927604883417 ↗
40. Perentes A. · Chem. Vap. Deposition · 2007 · 13 · 17610.1002/cvde.200606583 ↗
41. Mehendale S. · Nanotechnology · 2013 · 24 · 14530310.1088/0957-4484/24/14/145303 ↗
42. Gopal V. · Nano Lett. · 2004 · 4 · 205910.1021/nl0492133 ↗
43. Plank H. · ACS Appl. Mater. Interfaces · 2014 · 6 · 101810.1021/am4045458 ↗
44. Geier B. · J. Phys. Chem. C · 2014 · 118 · 1400910.1021/jp503442b ↗
45. Takeguchi M. · Appl. Phys. A: Mater. Sci. Process. · 2008 · 93 · 43910.1007/s00339-008-4851-1 ↗
46. Porrati F. · J. Appl. Phys. · 2011 · 109 · 06371510.1063/1.3559773 ↗
47. Roberts N. A. · Nanoscale · 2013 · 5 · 40810.1039/C2NR33014H ↗
48. Roberts N. A. · Nanotechnology · 2013 · 24 · 41530110.1088/0957-4484/24/41/415301 ↗
49. Roberts N. A. · J. Vac. Sci. Technol. A · 2012 · 30 · 04140410.1116/1.4731254 ↗
50. Arnold G. · ACS Appl. Mater. Interfaces · 2014 · 6 · 738010.1021/am5008003 ↗
51. Plank H. · ACS Nano · 2012 · 6 · 28610.1021/nn204237h ↗
52. Hopf C. · New J. Phys. · 2008 · 10 · 09302210.1088/1367-2630/10/9/093022 ↗
53. Hiratani M. · J. Electrochem. Soc. · 2001 · 148 · C52410.1149/1.1381389 ↗
54. Campbell C. T. · Surf. Sci. · 1981 · 107 · 22010.1016/0039-6028(81)90622-1 ↗
55. Matsushima T. · Surf. Sci. · 1977 · 67 · 8910.1016/0039-6028(77)90372-7 ↗
56. Sachser R. · ACS Appl. Mater. Interfaces · 2014 · 6 · 1586810.1021/am503407y ↗