Wafer-Scale Synthesized MoS₂/Porous Silicon Nanostructures for Efficient and Selective Ethanol Sensing at Room Temperature

This paper presents the performance of a highly selective ethanol sensor based on MoS 2 -functionalized porous silicon (PSi). The uniqueness of the sensor includes its method of fabrication, wafer scalability, affinity for ethanol, and high sensitivity. MoS 2 nanoflakes (NFs) were synthesized by sulfurization of oxidized radio-frequency (RF)-sputtered Mo thin films. The MoS 2 NFs synthesis technique is superior in comparison to other methods, because it is chip-scalable and low in cost. Interdigitated electrodes (IDEs) were used to record resistive measurements from MoS 2 /PSi sensors in the presence of volatile organic compound (VOC) and moisture at room temperature. With the effect of MoS 2 on PSi, an enhancement in sensitivity and a selective response for ethanol were observed, with a minimum detection limit of 1 ppm. The ethanol sensitivity was found to increase by a factor of 5, in comparison to the single-layer counterpart levels. This impressive response is explained on the basis of an analytical resistive model, the band gap of MoS 2 /PSi/Si, the interface formed between MoS 2 and PSi, and the chemical interaction of the vapor molecules and the surface. This two-dimensional (2D) composite material with PSi paves the way for efficient, highly responsive, and stable sensors.