DataVXACS Applied Materials & InterfacesPaper
journal article·2023-07-12

Efficient Suppression of Persistent Photoconductivity in β-Ga2O3-Based Photodetectors with Square Nanopore Arrays

Huarong Yang, Tong-Huai Cheng, Qian Xin, Yiyuan Liu, Hua Yu Feng, Feng Luo, Wenxiang Mu, Zhitai Jia, Xutang Tao

ACS Applied Materials & Interfaces· Volume 15· Issue 27
Publisher page
Source abstract

Abstract

In this work, square nanopore arrays were developed on the surface of β-Ga 2 O 3 microflakes using focused ion beam (FIB) etching, and solar-blind photodetectors (PDs) were fabricated based on the β-Ga 2 O 3 microflakes with square nanopore arrays. The β-Ga 2 O 3 microflake-based device was transformed from a gate voltage depletion mode to an oxygen depletion mode by FIB etching. The developed device exhibited excellent solar-blind PD performance with extremely high responsivity (1.8 × 10 5 at 10 V), detectivity (3.4 × 10 18 Jones at 10 V), and light-to-dark ratio (9.3 × 10 8 at 5 V) as well as good repeatability and excellent stability. The intrinsic mechanism responsible for this performance was then systematically discussed. This work opens up a new avenue for the fabrication of high-performance β-Ga 2 O 3 -based low-dimensional PDs with high reproducibility by employing the FIB etching process.
Source: openalex_inverted_index · Quality: baseline

Research context

Nanomaterials

OpenAlex topics: Ga2O3 and related materials · ZnO doping and properties · Advanced Photocatalysis Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

School of Microelectronics, Shandong University, Ji’nan 250100, China

Tianjin Key Lab for Rare Earth Materials and Applications, Center for Rare Earth and Inorganic Functional Materials, School of Materials Science and Engineering, Nankai University, Tianjin 300350, China

State Key Laboratory of Crystal Materials, Institute of Novel Semiconductors, Institute of Crystal Materials, Shandong University, Jinan 250100, Shandong, China

Shandong Research Institute of Industrial Technology, Jinan 250100, Shandong, China

Shenzhen Research Institute of Shandong University, Shenzhen 518057, China

Funding

National Key Research and Development Program of China · Special Project for Research and Development in Key areas of Guangdong Province · China Postdoctoral Science Foundation · Fundamental Research Fund of Shandong University · Shandong University · National Natural Science Foundation of China · Natural Science Foundation of Shandong Province

References (39)

Show source-provided references
1. 10.1016/j.mattod.2015.06.00110.1016/j.mattod.2015.06.001 ↗
2. 10.1088/0268-1242/18/4/20110.1088/0268-1242/18/4/201 ↗
3. 10.1039/c0nr00702a10.1039/c0nr00702a ↗
4. 10.1063/1.357491110.1063/1.3574911 ↗
5. 10.1143/apex.1.01120210.1143/apex.1.011202 ↗
6. 10.1021/acsami.8b1952410.1021/acsami.8b19524 ↗
7. 10.1143/jjap.48.07020210.1143/jjap.48.070202 ↗
8. 10.1109/jphot.2017.273162510.1109/jphot.2017.2731625 ↗
9. 10.1515/nanoph-2020-029510.1515/nanoph-2020-0295 ↗
10. 10.1038/s41467-023-36117-810.1038/s41467-023-36117-8 ↗
11. 10.1039/c7ce01076a10.1039/c7ce01076a ↗
12. 10.1109/led.2021.305010710.1109/led.2021.3050107 ↗
13. 10.1109/led.2018.287201710.1109/led.2018.2872017 ↗
14. 10.1002/adfm.20150023110.1002/adfm.201500231 ↗
15. 10.1063/1.11879910.1063/1.118799 ↗
16. 10.1021/nl901655710.1021/nl9016557 ↗
17. 10.1063/5.007890410.1063/5.0078904 ↗
18. 10.1038/nmat325610.1038/nmat3256 ↗
19. 10.1002/aelm.20190038910.1002/aelm.201900389 ↗
20. 10.1109/led.2021.310819010.1109/led.2021.3108190 ↗
21. 10.1186/1556-276X-6-40410.1186/1556-276X-6-404 ↗
22. 10.1002/1521-4095(20020116)14:2<158::aid-adma158>3.0.co;2-w10.1002/1521-4095(20020116)14:2<158::aid-adma158>3.0.co;2-w ↗
23. 10.1021/nl070111x10.1021/nl070111x ↗
24. 10.1063/1.505462510.1063/1.5054625 ↗
25. 10.1039/c6tc02467j10.1039/c6tc02467j ↗
26. 10.1021/acsphotonics.9b0003210.1021/acsphotonics.9b00032 ↗
27. 10.1109/led.2016.263557910.1109/led.2016.2635579 ↗
28. 10.1063/1.36267710.1063/1.362677 ↗
29. Yu, S.; Ding, M.; Mu, W.; Jia, Z.; Hou, X.; Zhang, Z.; Tan, P.; Zhao, X.; Xu, G.; Long, S. β -Ga2O3 Micro-Flake FET SBPD with Record Detectivity of 3.87×l017Jones for Weak Light Detection. 2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM); IEEE, 2021.10.1109/EDTM50988.2021.9420997 ↗
30. Albert R. · 1963
31. 10.1016/j.ceramint.2022.04.27710.1016/j.ceramint.2022.04.277 ↗
32. 10.1021/jp312191c10.1021/jp312191c ↗
33. 10.1364/OE.21.01820710.1364/OE.21.018207 ↗
34. 10.1038/nphoton.2007.2610.1038/nphoton.2007.26 ↗
35. 10.1016/j.sna.2022.11367310.1016/j.sna.2022.113673 ↗
36. 10.1038/s41598-017-04350-z10.1038/s41598-017-04350-z ↗
37. 10.1063/1.369604510.1063/1.3696045 ↗
38. 10.1116/1.498307810.1116/1.4983078 ↗
39. 10.1063/1.497902810.1063/1.4979028 ↗