Experimental and Computational Studies on Octyl Hydroxamic Acid as an Environmentally Friendly Inhibitor of Cobalt Chemical Mechanical Polishing
Source abstract
Abstract
Octyl hydroxamic acid (OHA) was investigated as an inhibitor in H2O2-based alkaline silica dispersions for the polishing of cobalt (Co) films for interconnect applications. A combination of experiments and density functional theory (DFT) was used to investigate the inhibition effect and the mechanism of OHA on the Co surface. On the basis of the experiments, it can be proven that OHA has an inhibition effect on Co, which came from the inhibition of the cathodic reaction. The X-ray photoelectron spectroscopy (XPS) experiments show that the adsorption of OHA weakened the oxidation of the Co surface and protected the Co surface from corrosion. On the basis of the calculations, it can be proven that the OHAketone (ion) is most likely to react with the Co surface, and it can adsorb on the Co surface by Co–O bonds. This study provides important microscopic insights for understanding the corrosion protection of Co interconnect metals and helps to explain the corrosion inhibition mechanism of the organic–metal interface during the CMP process.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Diamond and Carbon-based Materials Research · Advanced materials and composites
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Electronics and Information Engineering, Hebei University of Technology, Tianjin 300130, People’s Republic of China
Tianjin Key Laboratory of Electronic Materials and Devices, Tianjin 300130, People’s Republic of China
National Demonstration Center for Experimental (Electronic and Communication Engineering) Education, Hebei University of Technology, Tianjin 300401, People’s Republic of China
Technology Transfer Center of Hebei University of Technology, Tianjin 300130, People’s Republic of China
Funding
Natural Science Foundation of Hebei Province · Ministry of Science and Technology of the People's Republic of China · National Demonstration Center for Experimental (Electronic and Communication Engineering) Education, Hebei University of Technology · Natural Science of Hebei Province Colleges and Universities
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