All-Inorganic Flexible Embedded Thin-Film Capacitors for Dielectric Energy Storage with High Performance
Abstract
Research context
OpenAlex topics: Advanced Sensor and Energy Harvesting Materials · Dielectric materials and actuators · Ferroelectric and Piezoelectric Materials
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Affiliations
School of Microelectronics, Xi’an Jiaotong University, Xi’an 710049, China
State Key Laboratory for Mechanical Behavior of Materials and School of Materials Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, China
State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi’an 710071, China
Frontier Institute of Science and Technology, Xi’an Jiaotong University, Xi’an 710049, China
Ernst Ruska Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, D-52425 Jülich, Germany
Funding
Ministry of Science and Technology of the People's Republic of China · Ministry of Education of the People's Republic of China · China Postdoctoral Science Foundation · National Natural Science Foundation of China