journal article·2015-02-11

Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate

Sanghoon Ji, Gu Young Cho, Wonjong Yu, Pei-Chen Su, Min Hwan Lee, Suk Won Cha

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Abstract

Nanoscale yttria-stabilized zirconia (YSZ) electrolyte film was deposited by plasma-enhanced atomic layer deposition (PEALD) on a porous anodic aluminum oxide supporting substrate for solid oxide fuel cells. The minimum thickness of PEALD-YSZ electrolyte required for a consistently high open circuit voltage of 1.17 V at 500 °C is 70 nm, which is much thinner than the reported thickness of 180 nm using nonplasmatic ALD and is also the thinnest attainable value reported in the literatures on a porous supporting substrate. By further reducing the electrolyte thickness, the grain size reduction resulted in high surface grain boundary density at the cathode/electrolyte interface.
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Research context

OpenAlex topics: Advancements in Solid Oxide Fuel Cells · Semiconductor materials and devices · Electronic and Structural Properties of Oxides

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Graduate School of Convergence Science and Technology, Seoul National University, Iui-dong, Yeongtong-gu, Suwon 443-270, South Korea

School of Engineering, University of California, Merced, 5200 North Lake Road, Merced, California 95343, United States

Department of Mechanical and Aerospace Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 151-742, South Korea

School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 639798, Singapore

Funding

National Research Foundation of Korea

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