Enhanced Performance of STI CMP by Pre-Irradiation Optimization of a Ce 1– x Y x O 2 /D-PVA-Based Slurry
Source abstract
Abstract
With the continuous development of the semiconductor industry, shallow trench isolation (STI) technology is facing increasingly stringent performance requirements. Building on previous research on the dual-action mechanism of CeO 2 /PVA abrasive particles, this study further optimized the performance of the abrasives through Y 3+ doping modification. Combined with the results of ultraviolet spectroscopy analysis, photocatalytic degradation tests, and X-ray photoelectron spectroscopy (XPS) characterization, it was found that Ce 0.96 Y 0.04 O 2 /D-PVA abrasive particles exhibit the best photocatalytic effect. Therefore, based on the Ce 0.96 Y 0.04 O 2 /D-PVA system, the influence of pre-irradiation of the polishing slurry on the performance of STI CMP was further investigated. The study revealed that the polishing slurry pre-irradiated for 10 min achieved a SiO 2 removal rate of 2540.5 Å/min, which was 43.91% higher than that of the non-pre-irradiated group. The Si 3 N 4 removal rate was 61.53% lower than that of the non-pre-irradiated group, and the selectivity ratio increased by 276.32% to 14.3. Meanwhile, the surface roughness of SiO 2 and Si 3 N 4 was reduced to 0.139 and 0.128 nm, respectively, indicating a significant improvement in surface quality.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Advanced Surface Polishing Techniques · TiO2 Photocatalysis and Solar Cells · Nuclear materials and radiation effects
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Material Science and Engineering
Shaanxi University of Science & Technology
Shaanxi Laboratory of Advanced Materials
Shaanxi Collaborative Innovation Center of Industrial Auxiliary Chemistry and Technology
Funding
Shaanxi University of Science and Technology · China Postdoctoral Science Foundation · National Natural Science Foundation of China · Key Research and Development Projects of Shaanxi Province
References (44)
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