Film Fabrication of Perovskites and their Derivatives for Photovoltaic Applications via Chemical Vapor Deposition

In recent decades, metal halide perovskites have attracted much attention after showing great potential in photovoltaic (PV) applications. With the rapid progress of perovskites, various thin-film fabrication methods have been studied intensively. However, a film deposition method with controllability, cost efficiency, scalability, and uniformity is required to obtain perovskite films with the desired morphologies and properties and achieve large-scale manufacture. Chemical vapor deposition (CVD) stands out among the various deposition methods because of its unique advantages. In this review, perovskite films for PV applications deposited by diverse CVD methods are discussed, and a summary of the development and investigation of CVD processes utilized is provided.