journal article·2026-05-12

Dual Effects of Xe Ion Irradiation on Hf 0.5 Zr 0.5 O 2 Capacitors: Ferroelectricity Enhancement and Durability Degradation

Hongjing Lai, Zongzhen Li, Kan-Hao Xue, Haili Ma, Jie Liu, Qing Luo, Xiangshui Miao

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Abstract

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Research context

OpenAlex topics: Ferroelectric and Negative Capacitance Devices · Ferroelectric and Piezoelectric Materials · Semiconductor materials and devices

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Affiliations

School of Integrated Circuits

Huazhong University of Science and Technology

Institute of Modern Physics, Chinese Academy of Sciences (CAS)

School of Nuclear Science and Technology

University of Chinese Academy of Sciences

Wintech-Nano (Suzhou) Co., Ltd.

Institute of Microelectronics, Chinese Academy of Sciences

Funding

National Key Research and Development Program of China · Innovation Center of Radiation Application, China Academy of Engineering Physics

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