Impact of the Seed Layer on the Domain Switching and Electrical Properties of PbZr 0.52 Ti 0.48 O 3 Thin Films
Source abstract
Abstract
Lead zirconate titanate (PZT) thin films are an important component for piezoelectric microelectromechanical systems (piezo-MEMS) and ferroelectric device applications. Three different seed layers, PbTiO 3 (PT), PbZrO 3 (PZ), and Pb 0.8 La 0.1 Ca 0.1 Ti 0.975 O 3 (PLCT), were applied to deposit PbZr 0.52 Ti 0.48 O 3 (PZT) films via the sol–gel method on Pt(111)/TiO 2 /SiO 2 /Si substrates. All films exhibited well-polycrystalline orientation. To demonstrate the differences of these films in device applications, the crystalline structure, surface morphology, piezoelectric, dielectric, and ferroelectric properties of these films were characterized. The results indicate reduced grain sizes in these films compared to pure PZT films. Under the action of the seed layers, the piezoelectric coefficients and domain switching behavior of these films were significantly improved. Furthermore, the PZT/PZ film exhibited an ultralow leakage current density (<10 –4 A/cm 2 ) and a loss tangent (<0.05) at ±350 kV/cm.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Ferroelectric and Piezoelectric Materials · Microwave Dielectric Ceramics Synthesis · Electronic and Structural Properties of Oxides
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Mechanical Science & Engineering
Huazhong University of Science and Technology
School of Materials Science and Engineering, State Key Laboratory of Material Processing and Die & Mould Technology
Guangdong HUST Industrial Technology Research Institute
Guangdong Provincial Key Laboratory of Manufacturing Equipment Digitization
College of Mechanical Engineering
Wuhan Polytechnic University
School of Material Science and Engineering
Guilin University of Electronic Technology
Faculty of Chemical Engineering
Industrial University of Ho Chi Minh City
Huangpu Institute of Materials
Funding
Science and Technology Planning Project of Guangdong Province · Basic and Applied Basic Research Foundation of Guangdong Province · National Natural Science Foundation of China · Dongguan Key Research &Development Program, China · Innovation Project of Optics Valley Laboratory
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