DataVXACS Applied Electronic MaterialsPaper
journal article·2023-02-28

Synthesis and Selenization of Thickness-Controllable In2O3 Films by Printed Oxide Skin of Liquid Metals

Bingjie Liao, Honglie Shen, Hongyan Zhu, Boxiang Gao, Zehui Wang, Jingzhe Zhang, Weibiao Mao, Yufang Li, Tianru Wu

ACS Applied Electronic Materials· Volume 5· Issue 2
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Source abstract

Abstract

Indium oxide (In 2 O 3 ) has been reported widely due to its good optical properties and stability in optoelectronics and other fields. However, it is difficult to realize thickness control of atomically thin In 2 O 3, which will confine the use of In 2 O 3 films. Here, we report a simple and precise method to synthesize thickness-controllable In 2 O 3 films using printed oxide skin of liquid metals. The cleaning processes were investigated to remove the metal residues on the films. It was found that liquid metal washing and annealing procedures could remove the residues without damaging the films and thus improve the uniformity. At the same time, the thickness of In 2 O 3 films was controlled by adjusting the oxygen concentration of the atmosphere. Furthermore, the band gap regulation of indium oxide was realized by adjusting the thickness, which provided a good basis for the selenization of oxide films.
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Research context

Electronic materialsMaterials processing

OpenAlex topics: ZnO doping and properties · Gas Sensing Nanomaterials and Sensors · Ga2O3 and related materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Jiangsu Key Laboratory of Materials and Technology for Energy Conversion, College of Materials Science & Technology, Nanjing University of Aeronautics & Astronautics, Nanjing 210016, China

State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

Department of Materials Science and Engineering, City University of Hong Kong, 999077 Hong Kong SAR, China

Funding

Youth Innovation Promotion Association of the Chinese Academy of Sciences · Government of Jiangsu Province · Science and Technology Commission of Shanghai Municipality · National Natural Science Foundation of China · Chinese Academy of Sciences

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