journal article·2020-05-26Open access

Field-Effect Transistor Figures of Merit for Vapor–Liquid–Solid-Grown Ge1-xSnx (x = 0.03–0.09) Nanowire Devices

Emmanuele Galluccio, Jessica Doherty, Subhajit Biswas, Justin D. Holmes, Ray Duffy

Abstract

Ge1-xSnx alloys form a heterogeneous material system with high potential for applications in both optoelectronic and high-speed electronics devices. The attractiveness of Ge1-xSnx lies in the ability to tune the semiconductor band gap and electronic properties as a function of Sn concentration. Advances in Ge1-xSnx material synthesis have raised expectations recently, but there are considerable problems in terms of device demonstration. Although Ge1-xSnx thin films have been previously explored experimentally, in-depth studies of the electrical properties of Ge1-xSnx nanostructures are very limited, specifically those on nanowires grown via a bottom-up vapor–liquid–solid (VLS) process using metal catalysts. In this study, a detailed electrical investigation is presented of nominally undoped Ge1-xSnx bottom-up-grown nanowire devices with different Sn percentages (3–9 at. %). The entire device fabrication process is performed at relatively low temperatures, the maximum temperature being 440 °C. Device current modulation is performed through backgating from a substrate electrode, achieving impressive on–off current (ION/IOFF) ratios of up to 104, showing their potential for electronic and sensor-based applications. Contact resistance (RC) extraction is essential for proper VLS-grown nanowire device electrical evaluation. Once the RC contribution is extracted and removed, parameter values such as mobility can change significantly, by up to 70% in this work. When benchmarked against other Ge1-xSnx electronic devices, the VLS-grown nanowire devices have potential in applications where a high ION/IOFF ratio is important and where thermal budget and processing temperatures are required to be kept to minimum.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Nanowire Synthesis and Applications · Photonic and Optical Devices · Semiconductor materials and devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Tyndall National Institute, University College Cork, Lee Maltings Complex, Cork T12 R5CP, Ireland

School of Chemistry and AMBER Centre, University College Cork, Gaol Walk, Cork T12 YN60, Ireland

Funding

Science Foundation Ireland

References (59)

Show source-provided references
1. 10.1109/TED.2008.200515810.1109/TED.2008.2005158 ↗
2. 10.1109/VLSIT.2012.624249610.1109/VLSIT.2012.6242496 ↗
3. 10.1109/JEDS.2013.227158210.1109/JEDS.2013.2271582 ↗
4. 10.1038/scientificamerican0901-5810.1038/scientificamerican0901-58 ↗
5. 10.1021/nl025875l10.1021/nl025875l ↗
6. 10.1063/1.161164410.1063/1.1611644 ↗
7. 10.1126/science.106619210.1126/science.1066192 ↗
8. 10.1126/science.106271110.1126/science.1062711 ↗
9. 10.1021/acssensors.8b0007310.1021/acssensors.8b00073 ↗
10. 10.1186/1556-276X-6-28710.1186/1556-276X-6-287 ↗
11. 10.1063/1.175584610.1063/1.1755846 ↗
12. 10.1063/1.216345410.1063/1.2163454 ↗
13. 10.1088/1674-1056/24/2/02421110.1088/1674-1056/24/2/024211 ↗
14. 10.1109/JQE.2015.241028310.1109/JQE.2015.2410283 ↗
15. Gupta, S.; Vincent, B.; Yang, B.; Lin, D.; Gencarelli, F.; Lin, J.Y. J.; Chen, R.; Richard, O.; Bender, H.; Magyari-Köpe, B.; Caymax, M.; Dekoster, J.; Nishi, Y.; Saraswat, K. C. Towards high mobility GeSn channel nMOSFETs: Improved surface passivation using novel ozone oxidation method; 2012 International Electron Devices Meeting, IEEE: 2012; pp 16.2. 1–16.2. 4.10.1109/IEDM.2012.6479052 ↗
16. 10.1038/nphoton.2014.32110.1038/nphoton.2014.321 ↗
17. 10.1002/advs.20170095510.1002/advs.201700955 ↗
18. 10.1063/1.490354010.1063/1.4903540 ↗
19. 10.1364/OE.26.01030510.1364/OE.26.010305 ↗
20. Lei, D.; Lee, K. H.; Bao, S.; Wang, W.; Masudy-Panah, S.; Yadav, S.; Kumar, A.; Dong, Y.; Kang, Y.; Xu, S. The first GeSn FinFET on a novel GeSnOI substrate achieving lowest S of 79 mV/decade and record high Gm, int of 807 μS/μm for GeSn P-FETs; 2017 Symposium on VLSI Technology, IEEE: 2017; pp T198-T199.10.23919/VLSIT.2017.7998170 ↗
21. 10.1109/LED.2018.280816710.1109/LED.2018.2808167 ↗
22. 10.1021/acs.nanolett.6b0462710.1021/acs.nanolett.6b04627 ↗
23. 10.1021/acs.nanolett.6b0331610.1021/acs.nanolett.6b03316 ↗
24. 10.1021/acs.chemmater.9b0047510.1021/acs.chemmater.9b00475 ↗
25. 10.1038/ncomms1140510.1038/ncomms11405 ↗
26. 10.1007/s12274-017-1430-910.1007/s12274-017-1430-9 ↗
27. 10.1021/acs.chemmater.5b0275710.1021/acs.chemmater.5b02757 ↗
28. 10.1039/C5CC03639A10.1039/C5CC03639A ↗
29. 10.1021/acsnano.9b0284310.1021/acsnano.9b02843 ↗
30. 10.1038/s41598-019-50349-z10.1038/s41598-019-50349-z ↗
31. 10.1007/s11082-019-1992-810.1007/s11082-019-1992-8 ↗
32. Broderick, C. A.; Dunne, M. D.; Tanner, D. S. P.; Kirwanv, A. C.; O’Halloranl, E. J.; Schulz, S.; O’Reilly, E. P. Atomistic analysis of localisation and band mixing effects in Ge1-xSnx group-IV alloys; 2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO), IEEE: 2018; pp 1–4.10.1109/NANO.2018.8626255 ↗
33. Broderick, C. A.; O’Halloran, E. J.; O’Reilly, E. P. Comparative analysis of electronic structure evolution in Ge1-xSnx and Ge1–xPbx alloys; 2019 International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD), IEEE: 2019; pp 117–118.
34. 10.1109/JEDS.2015.239097110.1109/JEDS.2015.2390971 ↗
35. 10.1063/1.489867610.1063/1.4898676 ↗
36. 10.1063/1.477583910.1063/1.4775839 ↗
37. 10.1039/C8NR05296D10.1039/C8NR05296D ↗
38. 10.1109/LED.2018.285277510.1109/LED.2018.2852775 ↗
39. 10.1109/TED.2018.285673810.1109/TED.2018.2856738 ↗
40. 10.1039/C8TC02423E10.1039/C8TC02423E ↗
41. 10.1103/PhysRev.104.4710.1103/PhysRev.104.47 ↗
42. 10.1016/j.mssp.2012.06.01210.1016/j.mssp.2012.06.012 ↗
43. Schroder D. K. · 2015
44. 10.1049/el:1988036910.1049/el:19880369 ↗
45. 10.1063/1.478870810.1063/1.4788708 ↗
46. Gupta, S. Germanium-tin (GeSn) technology. Stanford University, 2013.
47. 10.1103/PhysRevB.75.04520810.1103/PhysRevB.75.045208 ↗
48. Han, G.; Su, S.; Zhan, C.; Zhou, Q.; Yang, Y.; Wang, L.; Guo, P.; Wei, W.; Wong, C. P.; Shen, Z. X. High-mobility germanium-tin (GeSn) p-channel MOSFETs featuring metallic source/drain and sub-370 C process modules; 2011 International Electron Devices Meeting, IEEE: 2011; pp 16.7. 1–16.7. 3.
49. 10.1109/LED.2012.223688010.1109/LED.2012.2236880 ↗
50. 10.1007/s10765-014-1785-z10.1007/s10765-014-1785-z ↗
51. 10.1039/C8TC04972F10.1039/C8TC04972F ↗
52. 10.1109/LED.2018.284688210.1109/LED.2018.2846882 ↗
53. 10.1002/pssr.20190042010.1002/pssr.201900420 ↗
54. 10.7567/JJAP.56.03BB0110.7567/JJAP.56.03BB01 ↗
55. 10.1063/1.497447310.1063/1.4974473 ↗
56. 10.1088/0022-3727/48/44/44510310.1088/0022-3727/48/44/445103 ↗
57. Kurosawa, M.; Kamata, Y.; Ikenoue, H.; Taoka, N.; Nakatsuka, O.; Tezuka, T.; Zaima, S. Sub-300° C fabrication of poly-GeSn junctionless tri-gate p-FETs enabling sequential 3D integration of CMOS circuits, In Proc. SSDM, 2014; pp 684–685.10.7567/SSDM.2014.F-2-5L ↗
58. 10.1021/jp044491b10.1021/jp044491b ↗
59. 10.1021/nl302684s10.1021/nl302684s ↗