journal article·2003-12

Ceramics for chemical sensing

C. O. Park, S. A. Akbar

Journal of Materials Science· Volume 38· Issue 23
Publisher page

Abstract

Many types of sensors have been developed to detect chemical species in the gas phase. These include optical based on color change or fluoresence, surface acoustic wave (SAW) devices, electrochemical, chemoresistive/semiconductive, field effect transistors (FET), metal-insulator-semiconductor (MIS) diode devices, and many other. Among these, resistive type sensors based on ceramic oxides are particularly attractive because of their low cost, wide range of applications and potential for use in electronic nose. This article focuses mainly on the resistive/semiconductive, especially the surface conductive ceramic oxide type gas sensors. The main emphasis is on the basic principles involving gas-solid reactions. Also discussed are selected applications with an emphasis on sensor design issues. Since SnO2 can be used as a model system for oxide-based sensors, most of the discussions focuses on this system, though other systems are occasionally highlighted illustrating recent developments.
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Research context

OpenAlex topics: Gas Sensing Nanomaterials and Sensors · Advanced Chemical Sensor Technologies · Acoustic Wave Resonator Technologies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (100+)

Show source-provided references
1. E. M. Logothetis Chem. Sens. Techn. 3 (1991) 89.
2. A. M. Azad S. A. Akbar S. G. Mhaisalkar L. D. Birkefeld and K. S. Goto J. Electrochem. Soc. 139 (1992) 3690.10.1149/1.2069145 ↗
3. N. Yamazoe and N. Miura Sensors and Actuators B 20 (1994) 5.10.1016/0925-4005(93)01183-5 ↗
4. S. Viswanathan R. G. Reddy and J. C. Malas (eds.), “Sensors and Modeling in Materials Processing: Techniques and Applications” (The Minerals, Metals and Materials Society, Warrendale, PA, 1997).
5. N. Fukatsu N. Kurita K. Kiode and T. Ohashi Solid State Ionics 113–115 (1998) 219.10.1016/S0167-2738(98)00375-0 ↗
6. S. A. Akbar and P. K. Dutta, “Ceramic Sensors for Industrial Applications” (Encyclopedia of Materials: Science and Technology, Elsevier, 2001) p. 1080.
7. O. W. Bynum D. R. Sheridan and J. A. White GRI Report 92/0373, 1992.
8. K. Swift, Industrial Sensor Technologies and Market, BCC, Inc. Report, GB-200R, Jan. 2002.
9. H. N. McMurray and J. Albadran MRS Bulletin 34 (1999) 55.10.1557/S0883769400052520 ↗
10. M. Liu T. Dol B. Flietner J. Lechner and I. Eisele Sensors and Actuators B 18/19 (1994) 678.
11. Y. Gurbuz W. P. Kang J. L. Davidson and D. V. Kerns ibid. 56 (1999) 151.10.1016/S0925-4005(99)00175-6 ↗
12. W. P. Kang and C. K. Kim ibid. 13/14 (1993) 682.10.1016/0925-4005(93)85143-X ↗
13. A. Samman S. Gebremariam L. Rimai X. Zhang J. Hangas and G. W. Auner ibid. 63 (2000) 91.10.1016/S0925-4005(00)00290-2 ↗
14. W. Zhu et al. J. Mat. Sci. (special issue on sensors) (2003).
15. U. Kirner B. Leibold D. Fischer K. D. Schierbaum N. Nicoloso W. F. Chu W. Weppner and W. Gopel Sensors and Actuators B 1 (1990) 103.10.1016/0925-4005(90)80181-X ↗
16. J. Penneweiss and B. Hoffmann Mater. Lett. 5 (1987) 121.10.1016/0167-577X(87)90018-8 ↗
17. W. J. Kaiser and E. M. Logothetis, SAE Paper No. 830167 (1983).
18. N. H. Chan and D. M. Smyth J. Electrochem. Soc. 123 (1976) 1584.10.1149/1.2132644 ↗
19. P. T. Moseley Meas. Sci. Technol. 8 (1997) 223.10.1088/0957-0233/8/3/003 ↗
20. P. T. Moseley and D. E. Williams Polyhedron 8 (1989) 1615.10.1016/S0277-5387(00)80606-3 ↗
21. K. D. Schierbaum U. K. Kirner J. F. Geiger and W. GÖpel Sensors and Actuators B 4 (1991) 87.10.1016/0925-4005(91)80181-I ↗
22. P. W. Selwood, “Chemisorption and Magnetization” (Academic Press, New York, 1975).
23. I. Lundstrom, in “Chemical Sensor Technology,” Vol. 2, edited by T. Seiyama (Elsevier, 1989) p. 1.
24. G. Korotchenkov V. Brynzari and S. Dmitriev Sensors and Actuators B 54 (1999) 197.10.1016/S0925-4005(99)00016-7 ↗
25. J. F. Boyle and K. A. Jones J. Electron. Mater. 6 (1977) 717.10.1007/BF02660346 ↗
26. G. Heiland and D. Kohl, in“Chemical SensorTechnology,” Vol. 1, edited by T. Seiyama (Kodansha, Tokyo, 1989) p. 15.
27. M. Egashira M. Najashima and S. Kawasumi J. Phys. Chem. 85 (1981) 4125.10.1021/j150626a034 ↗
28. Y. Tamaki M. Nagaishi and Y. Teraoka et al. Surf. Sci. 86 (1979) 335.10.1016/0039-6028(79)90411-4 ↗
29. S. Semancik and D. F. Cox Sensors and Actuators 12 (1987) 101.10.1016/0250-6874(87)85009-6 ↗
30. S. G. Davison and M. Steslicka, “Baisic Theory of Surface State” (Oxford Sci. Publications, 1992) p. 61.
31. S. R. Morrison, “The Chemical Physics of Surfaces,” 2nd ed. (1977) p. 135.10.1007/978-1-4615-8007-2 ↗
32. M. J. Madou and S. R. Morrison, “Chemical Sensing with Solid State Devices” (Academic Press, 1988) p. 74.
33. M. Iwamoto Y. Yoda N. Yamazoe and T. Seiyama J. Phys. Chem. 82 (1978) 2564.10.1021/j100513a006 ↗
34. S. C. Chang J. Vac. Sci. Technol. 17 (1980) 366.10.1116/1.570389 ↗
35. S. Lenaerts J. Roggen and G. Maes Spectrochimica Acta Part A—Molecular Spectroscopy 51 (1995) 883.10.1016/0584-8539(94)01216-4 ↗
36. J. P. Joly L. Gonzalez-Cruz and Y. Arnaud Bulletin de la Sociètè Chimique de France 1 (1986) 11.
37. B. Gillot C. Fey and D. Delafosse J. Chem. Physics 73 (1976) 19.
38. N. Yamazoe J. Fuchigami M. Kishikawa and T. Seiyama Surf. Sci. 86 (1979) 335.10.1016/0039-6028(79)90411-4 ↗
39. S. C. Chang J. Vac. Sci. Technol. 17 (1980) 366.10.1116/1.570389 ↗
40. J. Lunsford Catal. Rev. 8 (1973) 135.10.1080/01614947408071859 ↗
41. H. Chon and J. Pajares J. Catal. 14 (1969) 257.10.1016/0021-9517(69)90433-3 ↗
42. S. R. Morrison Surface Sci. 27 (1971) 586.10.1016/0039-6028(71)90190-7 ↗
43. N. Barsan M. Schweizer-Berberich and W. Gopel Fresenius J. Anal. Chem. 365 (1999) 287.10.1007/s002160051490 ↗
44. W. Schottky Ztschr. Phys. 113 (1939) 367.10.1007/BF01340116 ↗
45. W. Schottky and E. Spenke Wiss. Veroffentl. Siemens-Werkon. 18 (1939) 3.
46. N. F. Mott Proc. Roy. Soc. A 171 (1939) 27.
47. H. J. Engell and K. Hauffe Ztschr. Electrochem. 56 (1952) 336.
48. P. B. Weisz J. Chem. Phys. 21 (1953) 1531.10.1063/1.1699292 ↗
49. Th. Wolkenstein J. Chem. Phys. (USSR) 21 (1947) 1317.
50. Idem., ibid. 22 (1948) 311.
51. Idem., ibid. 26 (1952) 1462.
52. Th. Wolkenstein, ibid. 28 (1954) 422.
53. F. F Volkenstein, “Electron Processes on the Surface of Semiconductors during Chemisorption” (Nauka Publ., Moscow, 1987).
54. Th. Wolkenstein J. Chim. Phys. 54 (1957) 181.10.1051/jcp/1957540181 ↗
55. Idem. Advan. Catal. 12 (1960) 189.
56. W. E. Garner, ibid. 9 (1957) 169.
57. O. V. Krylov S. Z. Roginsky and E. A. Fokina Bull. Acad. Sci. USSR, Div. Chem. Sci. (1957) 422.
58. P. T. Moseley and B. C. Tofield, “Solid State Gas Sensors” (Adam Hilger, 1987) p. 93.
59. J. F. McAleer P. T. Moseley J. O. W. Norris and D. E. Williams J. Chem. Soc., Faraday Trans. 1(83) (1987) 1323.10.1039/f19878301323 ↗
60. K. D. Schierbaum U. Weimar and W. GÖpel Sensors and Actuators B 3 (1991) 205.10.1016/0925-4005(91)80007-7 ↗
61. M. Nakagawa and H. Mitsudo Surf. Sci. 175 (1986) 157.10.1016/0039-6028(86)90089-0 ↗
62. P. K. Clifford and D. T. Tuma Sensors and Actuators 3 (1983) 233.10.1016/0250-6874(82)80026-7 ↗
63. P. K. Clifford, in Proc. 1st Int. Conf. Chemical Sensors, Fukuoka, Japan (Kodansha, Elsevier, 1983) p. 135.
64. K. D. Schierbaum U. Weimar and W. GÖpel Sensors and Actuators B 3 (1991) 205.10.1016/0925-4005(91)80007-7 ↗
65. S. Strassler and A. Reis ibid. 4 (1983) 465.10.1016/0250-6874(83)85058-6 ↗
66. H. Windischmann and P. Mark J. Electrochem. Soc. 126 (1979) 627.10.1149/1.2129098 ↗
67. K. Ihokura and J. Watson, “The Stannic Oxide Gas Sensor Principles and Applications” (CRC Press, 1994) p. 55.
68. P. K. Clifford and D. T. Tuma Sensors and Actuators 3 (1983) 233.10.1016/0250-6874(82)80026-7 ↗
69. H. Pink L. Treitinger and L. Vite Jpn. J. Appl. Phys. 19 (1980) 513.10.1143/JJAP.19.513 ↗
70. N. Savage, “Development and Characterization of High-Temperature, Selective, Titania-Based Gas Sensors,” Ph.D. thesis, The Ohio State University, Columbus, OH, 2002.
71. Figaro Technical Handbook.
72. K. D. Schierbaum S. Vaihinger W. GÖpel H. H. fan den Vlekkert B. Kloeck and N. F. de Rooij Sensors and Atuators B 1 (1990) 171.10.1016/0925-4005(90)80195-6 ↗
73. T. M. Uen K. F. Chen and Y. S. Gou Thin Solid Film 158 (1988) 69.10.1016/0040-6090(88)90304-5 ↗
74. M. Digiulio G. Micocci R. Rella P. Siciliano and A. Tepore Sensors and Actuators B 23 (1995) 193.10.1016/0925-4005(94)01275-M ↗
75. S. S. Park and J. D. Mackenzie Thin Solid Film 274 (1996) 154.10.1016/0040-6090(95)07075-3 ↗
76. C. Xu J. Tamaki N. Miura and N. Yamazoe Sensors and Actuators B 3 (1991) 147.10.1016/0925-4005(91)80207-Z ↗
77. N. Yamazoe ibid. 5 (1991) 7.10.1016/0925-4005(91)80213-4 ↗
78. S. Matsushima T. Maekawa J. Tamaki N. Miura and N. Yamazoe Sensors and Actuators B: Chemical 9 (1991) 71.10.1016/0925-4005(92)80196-5 ↗
79. Y. Nakao Hyomen 24 (1986) 413.
80. T. Kaji H. Oono T. Nakahara N. Yamazoe and T. Seiyama J. Chem. Soc. Jpn. (1980) 1088.10.1246/nikkashi.1980.1088 ↗
81. G. E. Batley A. Ekstrom and D. A. Johnson J. Catal. 36 (1975) 285.10.1016/0021-9517(75)90038-X ↗
82. S. R. Morrison Sensors and Actuators 12 (1987) 425.10.1016/0250-6874(87)80061-6 ↗
83. J. Horiuti and T. Toya, in “Soilid State Surface Science,” edited by M. Green (Marcel Dekker, New York, 1969) Vol. 1.
84. C. Tompkins, in “The Solid-Gas Interface,” edited by E. A. Flood (Marcel Dekker, New York, 1967) Chapt. 25.
85. S. Matsushima Y. Teraoka N. Miura and N. Yamazoe Jpn. J. Phys. 27 (1988) 1798.10.1143/JJAP.27.1798 ↗
86. N. Yamazoe Y. Kurokawa and T. Seiyama Sensors and Actuators 4 (1983) 283.10.1016/0250-6874(83)85034-3 ↗
87. A. R. Gonzalez-Elipe J. Soria and G. Munuera J. Catal. 76 (1982) 254.10.1016/0021-9517(82)90256-1 ↗
88. N. Yamamoto S. Tonomura T. Matsuoka and H. Tsubomura J. Appl. Phys. 52 (1981) 6227.10.1063/1.328564 ↗
89. K. Kimoto and S. R. Morrison Z. Phys. Chem. N. F. 108 (1977) 11.10.1524/zpch.1977.108.1.011 ↗
90. K. D. Schierbaum U. K. Kirner J. F. Geiger and W. GÖpel Sensors and Actuators B 4 (1991) 87.10.1016/0925-4005(91)80181-I ↗
91. N. Yamazoe Y. Kurokawa and T. Seiyama ibid. 4 (1983) 283.10.1016/0250-6874(83)85034-3 ↗
92. Crank, “The Mathematics of Diffusion,” 2nd ed. (Oxford Science Publications, 1975) p. 334.
93. P. T. Moseley and B. C. Tofield, “Solid State Gas Sensors” (Adam Hilger, 1987) p. 103.
94. M. Egashira Y. Shimizu and Y. Takao, in Proc. Symp. on Chemical Sensor II, edited by M. Butler, A. Ricco and N. Yamazoe, Vol. 93-7 (The Electrochemcical Soc., NJ, 1993) p. 510.
95. W. GÖpel and G. Reinhardt, “Sensors Update,” Vol. 1 (VCH, Weinheim, 1996) p. 47.
96. X. Vilanova E. Liovet J. Brezmes J. Calderer and X. Correig Sensors and Actuators B 48 (1998) 425.10.1016/S0925-4005(98)00080-X ↗
97. N. Komori S. Sakai and K. Komatsu, in Proc. Int. Meeting on Chem. Sensors, Fukuoka, Japan, edited by T. Seiyamaet al. (Kodansha and Elsevier, 1983) p. 57.
98. M. Fleischer M. Seth C.-D. Kohl and H. Meixner Sensors and Actuators B 35/36 (1996) 297.10.1016/S0925-4005(97)80085-8 ↗
99. A. Katsuki and K. Fukui ibid. 52 (1998) 30.10.1016/S0925-4005(98)00252-4 ↗
100. M. Fleischer and H. Meixner ibid. 52 (1998) 179.10.1016/S0925-4005(98)00271-8 ↗