Hydrogen-Terminated Diamond MOSFETs Using Ultrathin Glassy Ga2O3 Dielectric Formed by Low-Temperature Liquid Metal Printing Method
Source abstract
Abstract
The p-type surface conductivity of hydrogen-terminated diamond (H-diamond) provides a viable approach toward diamond-based wide-bandgap metal-oxide-semiconductor field-effect transistors (MOSFETs) for high-power and high-frequency electronics. A facile, low-cost, and low-temperature method to form gate dielectrics on diamond that also preserves the integrity of hydrogen-termination is highly desirable for high-performance diamond surface electronics with process flexibility and high yield. In this work, we demonstrate a p-channel diamond MOSFET with an ultrathin glassy Ga2O3 dielectric layer derived from liquid metal. A liquid metal printing method was employed to transfer an amorphous Ga2O3 layer over the desired active p-channel region of H-diamond at low temperature, allowing the protection and preservation the hydrogen-terminated surface while also forming an efficient gate dielectric. The results of this work suggest that the liquid metal method can provide an efficient, low-cost, and high-yield pathway to form high-quality dielectrics for diamond-based transistors.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Semiconductor materials and devices · Ga2O3 and related materials · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Physics and Astronomy, Monash University, Clayton, Victoria 3800, Australia
Department of Mathematics and Physics, School of Computing, Engineering and Mathematical Sciences, La Trobe University, Bundoora, Victoria 3086, Australia
School of Science, RMIT University, Melbourne, Victoria 3001, Australia
Bio21 Institute, The University of Melbourne, Melbourne, Victoria 3010, Australia
Department of Chemical Engineering, The University of Melbourne, Parkville, Victoria 3010, Australia
School of Physics, The University of Melbourne, Melbourne, Victoria 3010, Australia
School of Chemistry and Physics, Queensland University of Technology, Brisbane, Queensland 4001, Australia
Centre for Materials Science, Queensland University of Technology, Brisbane, Queensland 4001, Australia
School of Engineering, RMIT University, Melbourne, Victoria 3001, Australia
Funding
Australian Research Council · Queensland University of Technology
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