Laser photosublimation of compound semiconductors
Source abstract
Abstract
The visible-laser sublimation of CdTe, HgCdTe, CdS, and GaAs has been studied. A dynamic light guiding has been identified with an active feedback mechanism and is connected to the observation of 0.4 μm wide single-mode guiding structures during deep etching. The incipient stages of sublimation have been studied by mass spectrometry and are discussed in relation to diffusion mechanisms in the solid state.
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Research context
OpenAlex topics: Advanced Semiconductor Detectors and Materials · Surface Roughness and Optical Measurements · Laser-induced spectroscopy and plasma
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References (12)
Show source-provided references
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