journal article·2020-04-14Open access

Epitaxial growth of Mg_xCa_1−xO on 4H–SiC(0001) and β-Ga₂O₃ wide band gap semiconductors with atomic layer deposition

Xiabing Lou, Xian Gong, Sang Bok Kim, Roy G. Gordon

Journal of Materials Research· Volume 35· Issue 7

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Source: crossref · Quality: short

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Electronic materials Materials processing

OpenAlex topics: Ga2O3 and related materials · ZnO doping and properties · Advanced Photocatalysis Techniques

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