journal article·2017-11-14

Hetero-epitaxy of high quality germanium film on silicon substrate for optoelectronic integrated circuit applications

Kwang Hong Lee, Shuyu Bao, Yiding Lin, Wei Li, P Anantha, Lin Zhang, Yue Wang, Jurgen Michel, Eugene A. Fitzgerald, Chuan Seng Tan

Journal of Materials Research· Volume 32· Issue 21
Publisher page

Abstract

Integration of photonic devices on silicon (Si) substrates is a key method in enabling large scale manufacturing of Si-based photonic-electronic circuits for next generation systems with high performance, small form factor, low power consumption, and low cost. Germanium (Ge) is a promising material due to its pseudo-direct bandgap and its compatibility with Si-CMOS processing. In this article, we present our recent progress on achieving high quality germanium-on-silicon (Ge/Si) materials. Subsequently, the performance of various functional devices such as photodetectors, lasers, waveguides, and sensors that are fabricated on the Ge/Si platform are discussed. Some possible future works such as the incorporation of tin (Sn) into Ge will be proposed. Finally, some applications based on a fully monolithic integrated photonic-electronic chip on an Si platform will be highlighted at the end of this article.
Source: expertdata · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Photonic and Optical Devices · Thin-Film Transistor Technologies · Nanowire Synthesis and Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

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