journal article·2026

Novel environmentally friendly chemical mechanical polishing for zinc oxide in an alkaline environment using silica and ceria mixed abrasives

Xiubin Zhang, Zhenyu Zhang, Xiaoping Wu, Cheng Fan, Bowei Zhang, Yanxun Xiang, Fuzhen Xuan, Xingqiao Deng, Jiaxin Yu

Journal of Materials Chemistry C· Volume 14· Issue 25
Publisher page

Abstract

Zinc oxide (ZnO) is widely used in high-performance semiconductor and optoelectronic devices.
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short

Research context

OpenAlex topics: Advanced Surface Polishing Techniques · Metal Extraction and Bioleaching · Minerals Flotation and Separation Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

State Key Laboratory of Advanced Fiber Materials, College of Mechanical Engineering, Donghua University, Shanghai 201620, China

Suzhou Cybrid Technologies Inc., Suzhou 215200, China

School of Future Science and Engineering, Soochow University, Suzhou 215222, China

School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai 200237, China

School of Mechanical and Electrical Engineering, Chengdu University of Technology, Chengdu 610059, China

School of Manufacturing Science and Engineering, Southwest University of Science and Technology, Mianyang 621010, China

Funding

Fundamental Research Funds for the Central Universities

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