journal article·2025

Machine learning-driven soft plasma etching for precision structuring of biofunctional organic semiconductor films

Wei Wang, Mengna Dai, Xin Zou, Yu Zeng, Zile Zhao, Dai Linfeng, Qingqing Xie, Kai Yao, Shuqi Zhang, Yuping Quan, Yue Hu, Meng Gou, Zeyuan Gao, Zhenyan Wang, Xu Li, Lihong Qi, Kaifeng Shen, Yuheng Wang, Yaqing Zhang

Journal of Materials Chemistry C· Volume 13· Issue 45
Publisher page

Abstract

This study pioneers a novel in situ strategy for depth-resolved analysis of organic thin films by integrating soft plasma etching with real-time spectroscopy.
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short

Research context

OpenAlex topics: Semiconductor materials and devices · Advanced Memory and Neural Computing · Organic Electronics and Photovoltaics

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

School of Electrical and Electronic Engineering, Chongqing University of Technology, Chongqing, 401320, China

Department of Medical Engineering, Army Medical University Second Affiliated Hospital, Chongqing, 400030, China

Chongqing Brain and Intelligence Science Center, Chongqing, 400060, China

Department of Psychology, University of Illinois Urbana-Champaign, Champaign, IL 61820, USA

School of Information Science and Engineering, Southeast University, Nanjing, 210096, China

Department of Hepatobiliary Surgery, The Second Affiliated Hospital of Army Medical University, Chongqing 400037, China

Department of Plastic Surgery, Fujian Medical University Union Hospital, Fujian Medical University, Fuzhou 350001, China

Army Medical University Second Affiliated Hospital, Chongqing 400037, China

Health Management Center, Western District Hospital, Chongqing 400039, China

Department of Pediatric Orthopaedics, Xinhua Hospital Affiliated to Shanghai Jiao Tong University, School of Medicine, Shanghai, 200092, China

Funding

Natural Science Foundation of Chongqing Municipality

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