Influence of ion bombardment on the refractive index of laser pulse deposited oxide films
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Abstract
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Research context
OpenAlex topics: Semiconductor materials and devices · Metal and Thin Film Mechanics · Ion-surface interactions and analysis
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References (5)
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2. Sankur · J. Vac. Sci. Technol. A · 1987 · 5 · 286910.1116/1.574257 ↗
3. Sankur · Thin Solid Films · 1992 · 218 · 16110.1016/0040-6090(92)90915-X ↗
4. Scaglione · Thin Solid Films · 1992 · 214 · 18810.1016/0040-6090(92)90768-7 ↗
5. Reisse · Thin Solid Films · 1994 · 241 · 11910.1016/0040-6090(94)90410-3 ↗