Electrical Properties of Thick Lead Zirconate Titanate Films Fabricated Using a New Sol-Gel Processing

Lead zirconate titanate (Pb(Zr0.53Ti0.47)O3,PZT) ferroelectric films 2～60μm in thick- ness were successful1y fabricated on Pt-coated oxidized Si substrates(Pt/Ti/SiO2/Si) by a new sol gel processing. The microstructure and morphology of the prepared PZT thick films were inves- tigated via X-ray diffractometry and scanning electron microscopy techniques. X-ray diffraction patterns taken on these films show single-phase perovskite-type structure, and no pyrochlore phase exists in thick films, and SEM micrographs suggest that the PZT thick films are of high density, crack-free, and uniformity. Dielectric constant of 860, loss tangent of 0.03, remanent polarization of 25μC/cm2, a coercive field of 40kV/cm were measured on 50μm thick films.