article·1999-01-01

Time Domain Dielectric spectra of depletion Layer

Mi Chen

Abstract

Because of slow polarization and non-linear effects, the dynamic properties of Metal-Semiconductor-Insulator-Metal (MSIM) layer were obtained incorrectly by frequency domian spectra with sinusoidal current. For this structure, time domain dielectric spectra can distinguish the effects reliably between contact and insulating layer of MOS structure. More important information of space charges motion can also be obtained by this method.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: ZnO doping and properties

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