Epitaxial Layer-by-Layer Growth of BST Series Ferroelectric Thin Films at Low Temperature

SrTiO3(STO), BaTiO3(BTO) and Ba0.6Sro.4TiO3(BST)ferroelectric thin films were grown epitaxilly on SrTiO3(100) single crystal substrates by the laser molecular beam epitaxy(LMBE) method. The growth of the thin films was in - situ monitored with reflective high energy electron diffraction(RHEED). By using atomic force microscopy(AFM) and RHEED the growth modes were investigated. With the observation of the varieties of the RHEED intensity oscillations and the diffraction patterns the dynamic and the static crystallization temperature was controled and confirmed, the epitaxial growth of STO, BTO and BST thin films in layer-by-layer mode was performed at temperatures of 280, 330 and 340℃, respectively.