Study on Orientation Growth of KTa_(0.65)Nb_(0.35)O_3 Thin Films on SrTiO_3 (111) Substrates

Oriented KTa_(0.65)Nb_(0.35)O_3 thin films were grown on SrTiO_3 (111) single crystal substrates bymeans of potassium acetate, tantalum ethoxide and niobium ethoxide as precursors The presintering technological conditions were established by DTA-TGA. It was discovered that perovskitestructure KTN would decompose above 950℃ to form potassium-deficient phase K_2Ta_4O_(11). Thehomogeneous, high-density, 0.2μm grain size perovskite structure KTN thin films were obtainedwhen each layer presintered above 450℃ for 1h, multilayers sintered at 750℃ for 2h, and all ofheating and cooling rate was 1～2℃/min. The film grain size increased with sintering temperatureand time, at high temperature, aggregate of grains, holes and crackles formed on the film surface.The sintering temperature must be controlled under 950℃.