Investigation of Structural and Physical Properties of Pt/Pb(Zr_(0.4)Ti_(0.6))O_3/ITO Capacitors Fabricated on Glass Substrate

Pt/Pb(Zr0.4Ti0.6)O3(PZT)/ITO capacitors were fabricated on glass substrate,where PZT film was prepared by sol-gel method.The structural and physical properties of Pt/PZT/ITO capacitors were investigated.The microstructural,electrical and optical properties of Pt/PZT/ITO capacitors were characterized by X-ray diffraction(XRD),ferroelectric tester,UV-spectrophotometer,respectively.It is found that PZT is highly(101) oriented and well crystallized.Ferroelectric measurements indicate that Pt/PZT/ITO capacitor,measured at 5V,possesses good ferroelectric properties,such as fatigue-free characteristics,retention characteristics,large remnant polarization(41.7μC/cm2) and high resistivity(2.5×109Ω·cm).The analysis of the leakage current mechanism indicates that Pt/PZT/ITO capacitor showes Ohmic-like behaviour at low voltages(0.8V) and Schottky emission at high voltages(0.8V).From the optical measurement,stronger absorption in shortwave and stronger transmission in longwave range are observed.The maximum value of transmission reaches 95%.