Preparation, Microstructure, and Conductive Properties of BaPbO_2 Thin Films

Crackfree and small grain size perovskite-type ceramic BaPbO3 conductive thin films were deposited onto Al2O3 substrates by a modified sol-gel method using ethylene diamine tetra-acetic acid (EDTA), citric acid, and tartaric acid as the complex chelate agent. XRD, SEM, and EDS tests, together with resistivity date, show a good correlation among the Pb to Ba ratio, grain size, and sheet resistance. Experimental results demonstrate that BaPbO3 thin films with homogeneous composition can be prepared by the method mentioned above. Sheet resistance of BaPbO3 thin films decreases with Pb to Ba ratio or grain size increases. The influence of heat treatment on sheet resistance is related with the thickness of BaPbO3 thin films. The best electrical properties were obtained upon a rapid thermal anneal (RTA) at 700℃for 10 min. Perovskite BaPbO3 films with sheet resistance of 5.86Ω·□-1 were derived from 20 spin-coating layers and annealed at 700℃for 10min.