Phase Structure Development and Composition Analysis of PZT Thin Films Prepared by Metallo-organic Decomposition

PZT thin films were prepared by metallo-organic decomposition(MOD). Phase transformationfrom pyrochlore to perovskite was studied by XRD and TEM. XRD analysis showed that pyrochlorephase transformes into perovskite phase fully above 600℃ for the PZT thin films on Pt/Ti/SiO2/Sisubstrates. However, TEM results indicated, for the free-standing PZT thin films on Pt foilwith many microholes, that the transforming temperature from pyrochlore to perovskite is muchhigher, and the temperature is related to the thiCkness of thin films. The surfaCe states of MODderived PZT thin films were investigated by X-ray photoelectron spectroscopy(XPS) with wholeand narrow scanning measurement. The results showed that there are chemical-absorbed oxygenand contamination of carbon in the film surfaces which came from sample handling or pumpingoil. Other impurity could not be detected. The films have a little Ph-rich in the surface and astoichiometry of Zr/Ti ratio. However, the crystal lattice of the thin film is oxygen-deficiency.