journal article·2021-10-02Open access

Recent progress of oxide-TFT-based inverter technology

Kenji Nomura

Journal of Information Display· Volume 22· Issue 4

Abstract

Oxide semiconductor-based thin-film transistor (oxide-TFT) technology have gained significant attention since the innovation of n-channel oxide-TFT using ZnO and amorphous In–Ga–Zn–O (a-IGZO) channels because of their superior device properties including excellent electrical property such as high TFT mobility over >10 cm2/Vs and the low-cost manufacturability originating from the low-temperature processability. Already, n-channel a-IGZO-TFT is widely employed as a TFT pixel switching backplane for several high-performance active-matrix flat-panel displays, and oxide-TFT technology to date is well acknowledged as the best TFT technology for future device applications in the wide range area of electronics such as sensors, Internet of things (IoT), energy-harvesting, medical/bio-interface device, etc. Therefore, the development of large-scale circuit beyond discrete TFT device level becomes increasingly important and is vital to advance the next stage of oxide-TFT technology. In particular, developing oxide-TFT-based inverter device technology is the key for developing several digital and analog circuits. In this paper, the recent progress and challenges in oxide-TFT-based inverter technology, including unipolar NMOS, PMOS, CMOS, and CMOS-like inverters using ambipolar oxide-TFT, are reviewed.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Thin-Film Transistor Technologies · Transition Metal Oxide Nanomaterials · ZnO doping and properties

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Electrical and Computer Engineering, University of California, San Diego, La Jolla, USA

References (99)

Show source-provided references
1. 10.1038/s41928-017-0008-610.1038/s41928-017-0008-6 ↗
2. 10.1038/nature1231410.1038/nature12314 ↗
3. 10.1038/nature0309010.1038/nature03090 ↗
4. 10.1063/1.154267710.1063/1.1542677 ↗
5. Zhou Y. · 2020
6. 10.1007/s42341-020-00197-w10.1007/s42341-020-00197-w ↗
7. Wager J.F. · Inform. Display · 2020 · 36
8. 10.1002/978111916138710.1002/9781119161387 ↗
9. 10.1149/06701.0061ecst10.1149/06701.0061ecst ↗
10. Wong S. · 2008
11. 10.1038/nnano.2008.29610.1038/nnano.2008.296 ↗
12. 10.1126/science.115436710.1126/science.1154367 ↗
13. 10.1088/1361-6641/aa89ce10.1088/1361-6641/aa89ce ↗
14. 10.1017/CBO978113919506510.1017/CBO9781139195065 ↗
15. 10.1080/15980316.2017.138554410.1080/15980316.2017.1385544 ↗
16. 10.1088/1674-1056/26/4/04730710.1088/1674-1056/26/4/047307 ↗
17. Roy K. · 2000
18. 10.1016/j.jnoncrysol.2006.01.07310.1016/j.jnoncrysol.2006.01.073 ↗
19. Uyemura J.P. · 2001
20. Presley R. · Solid State Electron · 2006
21. 10.1109/LED.2007.89322310.1109/LED.2007.893223 ↗
22. 10.1063/1.302809310.1063/1.3028093 ↗
23. 10.1109/LED.2008.200290810.1109/LED.2008.2002908 ↗
24. 10.1143/JJAP.48.10020210.1143/JJAP.48.100202 ↗
25. 10.1109/LED.2009.201749610.1109/LED.2009.2017496 ↗
26. H. Yin, S. Kim, J. Park, I. Song, S.W. Kim, J. Hur, S. Park, S. Jeon, and C.J. Kim, The Proceedings of 2009 IEEE International Electron Devices Meeting (IEDM) 2009, 1–4.10.1109/IEDM.2009.5424389 ↗
27. 10.1109/LED.2010.205140410.1109/LED.2010.2051404 ↗
28. 10.1109/LED.2011.215779810.1109/LED.2011.2157798 ↗
29. Cho I.-T. · IEEE Electron Device Lett. · 2012 · 33 · 726
30. 10.1063/1.474780010.1063/1.4747800 ↗
31. 10.1109/LED.2013.226319310.1109/LED.2013.2263193 ↗
32. 10.1021/am402919f10.1021/am402919f ↗
33. 10.1109/LED.2014.234541210.1109/LED.2014.2345412 ↗
34. 10.1063/1.492179110.1063/1.4921791 ↗
35. Leppäniemi J. · IEEE Electron Device Lett. · 2016
36. 10.1002/adma.20160050310.1002/adma.201600503 ↗
37. 10.1109/TED.2016.258551910.1109/TED.2016.2585519 ↗
38. 10.1126/science.aah503510.1126/science.aah5035 ↗
39. 10.1109/LED.2016.252576110.1109/LED.2016.2525761 ↗
40. 10.1002/pssa.20160046910.1002/pssa.201600469 ↗
41. 10.1109/LED.2016.253512410.1109/LED.2016.2535124 ↗
42. 10.1109/LED.2016.253669910.1109/LED.2016.2536699 ↗
43. 10.1109/LED.2017.273758310.1109/LED.2017.2737583 ↗
44. 10.1002/aelm.20170015510.1002/aelm.201700155 ↗
45. 10.1002/aelm.20180003210.1002/aelm.201800032 ↗
46. 10.1109/LED.2018.281894910.1109/LED.2018.2818949 ↗
47. 10.1016/j.sse.2019.03.03010.1016/j.sse.2019.03.030 ↗
48. 10.1109/LED.2019.292471410.1109/LED.2019.2924714 ↗
49. 10.1021/acsami.0c0709110.1021/acsami.0c07091 ↗
50. Liang K. · J. Mater. Chem. C (Advance Article) · 2021
51. Shao K. · J. Mater. Sci. Technol · 2021
52. 10.1088/1468-6996/11/4/04430510.1088/1468-6996/11/4/044305 ↗
53. 10.1143/JJAP.45.430310.1143/JJAP.45.4303 ↗
54. Jung S.-H. · IEEE Electron Device Lett. · 2005 · 23
55. 10.1038/s41467-018-07882-810.1038/s41467-018-07882-8 ↗
56. 10.1016/j.orgel.2012.05.04510.1016/j.orgel.2012.05.045 ↗
57. 10.1109/TED.2017.278161810.1109/TED.2017.2781618 ↗
58. 10.1063/1.278585210.1063/1.2785852 ↗
59. 10.1063/1.273281910.1063/1.2732819 ↗
60. 10.1063/1.295640610.1063/1.2956406 ↗
61. 10.1063/1.303977910.1063/1.3039779 ↗
62. 10.1063/1.345879910.1063/1.3458799 ↗
63. 10.1889/1.362116110.1889/1.3621161 ↗
64. 10.1016/j.orgel.2011.08.00910.1016/j.orgel.2011.08.009 ↗
65. 10.1143/JJAP.51.02160410.1143/JJAP.51.021604 ↗
66. 10.1016/j.orgel.2012.06.03810.1016/j.orgel.2012.06.038 ↗
67. 10.1117/12.200289410.1117/12.2002894 ↗
68. 10.1016/j.orgel.2013.06.00710.1016/j.orgel.2013.06.007 ↗
69. 10.1002/j.2168-0159.2013.tb06389.x10.1002/j.2168-0159.2013.tb06389.x ↗
70. 10.1109/LED.2014.235742910.1109/LED.2014.2357429 ↗
71. 10.1038/ncomms509710.1038/ncomms5097 ↗
72. 10.1021/nl501601410.1021/nl5016014 ↗
73. 10.1109/LED.2014.236451410.1109/LED.2014.2364514 ↗
74. 10.1016/j.orgel.2015.03.00410.1016/j.orgel.2015.03.004 ↗
75. 10.1007/s12274-014-0596-710.1007/s12274-014-0596-7 ↗
76. 10.1038/srep1509910.1038/srep15099 ↗
77. 10.1021/acsami.5b0209310.1021/acsami.5b02093 ↗
78. Isakov I. · Appl. Phys. Lett. · 2016 · 109 · 26330
79. 10.1021/acsami.6b0025910.1021/acsami.6b00259 ↗
80. 10.7567/JJAP.55.04EL0410.7567/JJAP.55.04EL04 ↗
81. 10.1109/TED.2017.273120510.1109/TED.2017.2731205 ↗
82. 10.1016/j.jallcom.2018.05.18810.1016/j.jallcom.2018.05.188 ↗
83. 10.1063/1.506062710.1063/1.5060627 ↗
84. 10.1039/C8NR01358F10.1039/C8NR01358F ↗
85. 10.1109/TED.2018.283450610.1109/TED.2018.2834506 ↗
86. 10.1002/aelm.20190003410.1002/aelm.201900034 ↗
87. 10.1021/acsami.0c1253910.1021/acsami.0c12539 ↗
88. 10.1063/1.513908510.1063/1.5139085 ↗
89. 10.1002/aelm.20190084510.1002/aelm.201900845 ↗
90. 10.1515/ntrev-2019-003810.1515/ntrev-2019-0038 ↗
91. 10.1002/adma.20150308010.1002/adma.201503080 ↗
92. Nomura K.
93. 10.1063/1.347821310.1063/1.3478213 ↗
94. 10.1063/1.293627510.1063/1.2936275 ↗
95. 10.1063/1.365697410.1063/1.3656974 ↗
96. 10.1002/adma.20110223210.1002/adma.201102232 ↗
97. 10.1002/adma.20110322810.1002/adma.201103228 ↗
98. 10.1002/adfm.20120290710.1002/adfm.201202907 ↗
99. 10.1038/srep0467210.1038/srep04672 ↗