Effect of the substrate temperature on the structural and optical properties of ZnO films deposited by reactive magnetron sputtering

ZnO films with c-axis preferred orientation were prepared on glass substrates by RF magnetron sputtering at variant temperatures,effect of the substrate temperature on the structural and optical properties of ZnO thin films was studied by X-ray diffractometry(XRD),SPM and UV spectrophotometer.The results showed that the crystallization of the films were promoted by desirable substrate temperature;the films possessed a transmittance of about 90% in the visible region and a sharp optical absorption in the UV region;Furthermore,the band gap decreased and the absorption edges of the samples exhibited the red shift with the temperature increased.The theoretical calculations have been carried out with the quantum confinement model,and the calculated values were in good agreement with the experimental values.