article·2001-01-01Open access

Preparation of low resistance SnO_2 thin film by sol-gel method

Li Qun Ai

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Abstract

The SnO 2 thin film of low resistant was prepared by sol gel method. The relation between the prepared condition and the resistance of the thin film has been studied. XRD and XPS were employed to investigate the structure and micrography of SnO 2 thin film. The direct heat gas sensor prepared with SnO 2 thin film is sensitive for H 2S gas.
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OpenAlex topics: Gas Sensing Nanomaterials and Sensors · Advanced Sensor and Control Systems

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