Properties of diamond-like carbon films were deposited on 316 stainless steel

The thick diamond-like carbon(DLC) films were deposited on 316 stainless steel by pulsed glow discharge plasma vapor deposition(PGDVD) and cathodic arc discharge method(CAD).The composition,microstructure and mechanical property of the films were investigated by Raman spectroscopy,X-ray photoelectron spectroscopy(XPS),optical microscope,microscopic hardness meter and friction wear testing machine.It was found that the DLC films were improved owing to the compact structure and smooth surface.The G peak and D peak showed a move to a higher wave,the ID/IG and IT/IG intensity rate were 0.72 and 0.22,respectively.FT-IR analysis showed that the film contains more CHx key component of sp3;the friction coefficient reached 0.100 and the sp3 content was 60.7% and the thickness was 7mm in film.The mechanical hardness and the frictional surfaces trail of the DLC film were also measured.