Application of shape memory alloy thin films in MEMS
Source abstract
Abstract
Thin film of shape memory alloy has a great application potential for microactuator and microsensor in MEMS due to its perfect shape memory effect, superelasticity, and its particular performance as thin film. In this paper, application research statuses about microactuators and microsensors with thin films of shape memory alloy were presented, and at last their futures were also prospected.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Shape Memory Alloy Transformations
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References
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