Study on the graphene preparation on Cu-Ni alloy substrate by chemical vapor deposition

The Cu-Ni alloy thin films with different ratio of Cu and Ni were prepared by double targets magnetron sputtering method.The samples were characterized by energy dispersive analysis of X-rays(EDAX).The ratio of Cu and Ni was accurately determined.Three graphene samples were fabricated with benzene as carbon source on the same kind of Cu-Ni alloy substrates at variable temperature of 800,600 and 400℃ by chemical vapor deposition method to study the impact of temperature on the growth of graphene.Three graphene samples were produced on three different Cu-Ni alloy substrates at 400℃ to study the impact of different ratio of the substrates on the growth of graphene.