Preparation and photoelectric properties of transparent conductive yttrium-doped zinc oxide thin films

A new transparent conducting oxide (TCO) film with low resistivity and high transmittance in the visible range, yttrium-doped zinc oxide (YZO), was successfully prepared by RF magnetron sputtering on glass substrates at room temperature. The dependence of the electrical property of the films on the deposition pressure and power was investigated. X-ray diffraction (XRD) pattern shows that the YZO film is polycrystalline with a hexagonal structure and has a preferred orientation along the c-axis. The film, with a low resistivity of 8.71×10-4Ω·cm and a high transmittance of 92.3% in the visible range, has been obtained.