Modular Micromotor Fabrication with Self‐Focusing Lithography

Abstract Synthetic Janus micro/nanomotors can efficiently convert ambient energy into asymmetrical self‐propulsive force, overcoming random thermal fluctuations and enabling autonomous migration. Further modifications to the motors can equip them with different functional modules to meet different needs. However, developing a versatile and high‐yield fabrication method for multifunctional Janus micromotors remains challenging. In this study, a modular fabrication approach for micromotors with a particle‐tip structure based on the self‐focusing lithography induced by an array of TiO₂ microspheres is presented. By adjusting the tip composition or loading, precise programming of motor functionality is achieved, allowing for various capabilities such as photoredox reaction‐induced propulsion, fluorescent imaging, electric and magnetic navigation. Furthermore, the flexibility of this fabrication method by selectively loading materials onto two tips is demonstrated to achieve multifunctionality within a micromotor unit. This study proposes a straightforward and versatile approach for modular functional micromotors.