journal article·2022-06

Analog/RF Performance Projection of Ultra-Steep Si Doped HfO2 Based Negative Capacitance Electrostatically Doped TFET: A Process Variation Resistant Design

Shradhya Singh, Sangeeta Singh

Silicon· Volume 14· Issue 9
Publisher page

Abstract

The incorporation of Si doped HfO2 in negative capacitance electrostatically doped TFET realizes ultra-steep and process variation resistant structure. Here, Si:HfO2 is the gate stack ferroelectric material is used in conjunction with a high-K gate dielectric HfO2/TiO2. The conceptualization of intrinsic gate voltage amplification due to the alignment of ferroelectric dipoles comprehends the negative capacitance (NC) behavior. Moreover, the work-function difference between the source/drain electrodes and the silicon induces electrostatic doping. Thus, the detrimental doping related issues, heavy doping governed mobility degradation and statistical random dopant fluctuations (RDFs) can be eliminated and it results in more process variations immune design. This work has explored the impact of the symmetric and asymmetric structure of the considered devices on both the drain and source sides, in terms of the oxide thickness between the electrodes and the Si body. Here, analog/RF performance estimation is also carried out for the parameters such as transconductance (gm), output conductance (gd), unity gain frequency (fT), intrinsic gain (AV), transconductance frequency product (TFP), and gain frequency product (GFP), etc. Our study reveals that Si:HfO2 ferroelectric gate stack with TiO2 dielectric shows better device performance than Si:HfO2 ferroelectric gate stack with HfO2 dielectric for both dc as well as ac performance.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Advancements in Semiconductor Devices and Circuit Design · Ferroelectric and Negative Capacitance Devices · Semiconductor materials and devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (40)

Show source-provided references
1. Vardi MY (2014) Moore’s law and the sand-heap paradox. Commun ACM 57 (5)10.1145/2600347 ↗
2. Packan PA (1999) Pushing the limits. Science 285(5436):2079–208110.1126/science.285.5436.2079 ↗
3. Salahuddin S, Datta S (2008) Use of negative capacitance to provide voltage amplification for low power nanoscale devices. Nano Lett 8(2):405–41010.1021/nl071804g ↗
4. Khan AI, Chatterjee K, Wang B, Drapcho S, You L, Serrao C, Bakaul SR, Ramesh R, Salahuddin S (2015) Negative capacitance in a ferroelectric capacitor. Nat Mater: 1410.1038/nmat4148 ↗
5. Khan AI, Yeung CW, Chenming H u, Salahuddin S (2011) Ferroelectric negative capacitance MOSFET: capacitance tuning and antiferroelectric operation. IEEE Int Electron Devices Meeting (IEDM) 11 (3):1–11
6. Zhirnov VV, Cavin RK (2008) Nanoelectronics; negative capacitance to the rescue. Nat Nanotechnol 3:77–7810.1038/nnano.2008.18 ↗
7. Wang x., Yu P, Lei Z, Zhu C, Cao X, Liu F, You L, Zeng Q, Deng Y, Zhou J, Fu Q (2019) Van der Waals negative capacitance transistors. Nat Commun 10(1):1–810.1038/s41467-018-07882-8 ↗
8. Salvatore GA, Bouvet Dider, Ionescu AM (2008) Demonstration of subthrehold swing smaller than 60 mV/decade in Fe-FET with P (VDF-TrFE)/SiO2 gate stack. IEEE International Electron Devices Meeting (IEDM), pp 1–410.1109/IEDM.2008.4796642 ↗
9. Alexandru R, Salvatore GA, Jimenez D, Ionescu AM (2010) Metal-ferroelectric-meta-oxide-semiconductor field effect transistor with sub-60 mV/decade subthreshold swing and internal voltage amplification. IEEE International Electron Devices Meeting (IEDM), pp 16.1–3
10. Yeung CW, Khan AI, Salahuddin S, Hu C (2012) Non-Hysteretic Negative Capacitance FET with Sub-30 mV/dec Swing over 106 X Current Range and ION of 0.3 mA/μ m without Strain Enhancement at 0.3 V VDD. International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), pp 257 − 259
11. Ionescu AM, Lattanzio L, Salvatore GA, De Michielis L, Boucart K, Bouvet D (2010) The Hysteretic Ferroelectric Tunnel FET. IEEE Trans Electron Devices 57(12):3518–352410.1109/TED.2010.2079531 ↗
12. Salvatore GA, Lattanzio L, Bouvet D, Ionescu AM (2011) Modeling the temperature dependence of Fe-FET static characteristics based on Landau’s theory. IEEE Trans Electron Devices 58(9):3162–316910.1109/TED.2011.2160868 ↗
13. Lee MH, Lin JC, Wei YT, Chen CW, Tu WH, Zhuang HK, Tang M (2013) Ferroelectric negative capacitance hetero-tunnel field-effect-transistors with internal voltage amplification. In: IEEE International Electron Devices Meeting (IEDM), pp 4.5.1–4.5.410.1109/IEDM.2013.6724561 ↗
14. Boscke TS, Teichert S, Bräuhaus D., Müller J, Schroder U, Böttger U, Mikolajick T (2011) Phase transitions in ferroelectric silicon doped hafnium oxide. Appl Phys Lett 99(11):11290410.1063/1.3636434 ↗
15. Boscke TS, Müller J., Bräuhaus D., Schroder U, Böttger U (2011) Ferroelectricity in hafnium oxide thin films. Appl Phys Lett 99(10):10290310.1063/1.3634052 ↗
16. Clima S, Wouters DJ, Adelmann C, Schenk T, Schroeder U, Jurczak M, Pourtois G (2014) Identification of the ferroelectric switching process and dopant dependent switching properties in orthorhombic HfO2; A first principles insight, vol 10410.1063/1.4867975 ↗
17. Kwon D, Cheema S, Shanker N, Chatterjee K, Liao YH, Tan AJ, Hu C, Salahuddin S (2019) Negative capacitance FET With 1.8-nm-Thick Zr-Doped HfO2 Oxide. IEEE Electron Device Letters 40(6):993–99610.1109/LED.2019.2912413 ↗
18. Boucart K, Ionescu AM (2007) Double gate tunnel FET high-k gate dielectric. IEEE Trans Electron Devices 54(7):172510.1109/TED.2007.899389 ↗
19. Convertino C, Schmid H, Czornomaz L, Riel H, Sant S, Schenk A, Moselund K (2018) Complementary III-V heterojunction tunnel FETs monolithically integrated on silicon. ECS Trans 85 (6):139–15010.1149/08506.0139ecst ↗
20. Bhuwalka KK, Sedlmaier S, Ludsteck AK, Tolksdorf C, Schulze J, Eisele I (2004) Vertical tunnel field-effect transistor. IEEE Trans Electron Devices 51(2):279–28210.1109/TED.2003.821575 ↗
21. Vijayvargiya V, Vishvakarma SK (2014) Effect of drain doping profile on double-gate tunnel field-effect transistor and its influence on device RF performance. IEEE Trans Nanotechnol 13(5):974–98110.1109/TNANO.2014.2336812 ↗
22. Kumar MJ, Janardhanan S (2013) Doping-less tunnel field effect transistor; Design and investigation. IEEE Trans Electron Devices 60(10):3285–329010.1109/TED.2013.2276888 ↗
23. Rajasekharan B, et al. (2010) Fabrication and characterization of the charge-plasma diode. IEEE Electron Device Lett 31(6):528–53010.1109/LED.2010.2045731 ↗
24. Singh S, Kondekar PN (2014) Dopingless super-steep impact ionisation MOS (dopingless-IMOS) based on work-function engineering. Electron Lett 50(12):888–88910.1049/el.2014.1072 ↗
25. Singh S, Pal P, Kondekar PN (2014) Charge-plasma-based super-steep negative capacitance junctionless tunnel field effect transistor; design and performance. Electron Lett 50(25):1963–196510.1049/el.2014.3256 ↗
26. Singh S, Singh AP, Kondekar PN (2017) A novel self-aligned charge plasma Schottky barrier tunnel FET using work function engineering. Microelectron Eng 168:67–7510.1016/j.mee.2016.11.009 ↗
27. Singh S, Kondekar PN (2017) A novel electrostatically doped ferroelectric Schottky barrier tunnel FET; process resilient design. J Comput Electron 16(3):685–69510.1007/s10825-017-0987-6 ↗
28. Goswamiet R, Bhowmick B (2019) Comparative analysis of circular gate TFET and Heterojunction TFET for dielectric-modulated label-free biosensing. IEEE Sensors J 19(21):9600–960910.1109/JSEN.2019.2928182 ↗
29. AU Manual (2012) A device simulation software package. SILVACO Int, Santa Clara
30. Khan AI, et al. (2015) . Nat Mat 14(2):18210.1038/nmat4148 ↗
31. Krowne CM, et al. (2011) . Nano Lett 11(3):98810.1021/nl1037215 ↗
32. Singh S, Sinha R, Kondekar PN (2018) Impact of PZT gate-stack induced negative capacitance on analogue/RF figures-of-merits of electrostatically-doped ferroelectric Schottky-Barrier tunnel FET. IET Circuits, Devices & Systems10.1049/iet-cds.2018.5276 ↗
33. Kilchytska Valeriya, et al. (2003) Influence of device engineering on the analog and RF performances of SOI MOSFETs. IEEE Trans Electron Devices 50(3):577–58810.1109/TED.2003.810471 ↗
34. Mohapatra SK, Pradhan KP, Artola L, Sahu PK (2015) Estimation of analog/RF figures-of-merit using device design engineering in gate stack double gate MOSFET. Mater Sci Semicond Process 31:455–46210.1016/j.mssp.2014.12.026 ↗
35. Singh S, Kondekar PN, Pal P (2016) Transient performance estimation of charge plasma based negative capacitance junctionless tunnel FET, vol 3710.1088/1674-4926/37/2/024003 ↗
36. Ghosh P, Bhowmick B (2019) Effect of temperature on reliability issues of ferroelectric dopant segregated Schottky barrier tunnel field effect transistor (Fe DS-SBTFET). Silicon: 1–810.1007/s12633-019-00206-5 ↗
37. Kumar SP, Agrawal A, Chaujar R, Gupta RS, Gupta M (2011) Device linearity and intermodulation distortion comparison of dual material gate and conventional AlGaN/GaN high electron mobility transistor. Microelectron Reliab 51:587–59610.1016/j.microrel.2010.09.033 ↗
38. Ghosh P, Haldar S, Gupta RS, Gupta M (2012) An investigation of linearity performance and intermodulation distortion of GME CGT MOSFET for RFIC design. IEEE Trans Electron Devices 59 (12):3263–326810.1109/TED.2012.2219537 ↗
39. Razavi B (1998) RF microelectronics. Prentice Hall, Princeton
40. Nautiyal P, Naugarhiya A, Verma S (2019) Strained superjunction U-MOSFET with insulating layer between alternate pillars. Mater Res Express 6(4):04642410.1088/2053-1591/aaff1d ↗