DataVXSemiconductor Science and TechnologyPaper
journal article·2016-07-01

Accuracy of analyses of microelectronics nanostructures in atom probe tomography

F Vurpillot, N Rolland, R Estivill, S Duguay, D Blavette

Semiconductor Science and Technology· Volume 31· Issue 7
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Abstract

International audience
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

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Nanomaterials

OpenAlex topics: Advanced Materials Characterization Techniques · Diamond and Carbon-based Materials Research · Hydrogen embrittlement and corrosion behaviors in metals

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