Combined STEM-EDS tomography of nanowire structures
Source abstract
Abstract
Abstract The 3D spatial resolution, the material contrast and the evolution of the noise are analyzed in the reconstructed volume of a combined scanning transmission electron microscopy (HAADF-STEM) and energy dispersive x-ray spectroscopy (EDS) tomography experiment. Standard simultaneous iterative reconstruction technique and HAADF-EDS bimodal tomographic reconstruction are considered for the +/−90° tomography series of a pillar shaped sample embedding a full nanowire device. With a high number of iterations, a spatial resolution for both HAADF and EDS down to 5 nanometer can be reached for this volume. Best material’s contrast and minimum noise are obtained for medium number of iterations. Improvement of the signal-to-noise and contrast can be obtained by filtering the EDS data while the spatial resolution is not impacted. A fast and reliable preparation methodology for rectangularly shaped pillar samples for tomography analysis is discussed.
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Research context
OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Surface and Thin Film Phenomena
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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