Possibilities of X-ray interference diffractometry for the reconstruction of two-dimensional lattice deformation profiles in crystals

A method of reconstruction of two-dimensional lattice deformation fields in crystals with periodically distorted near-surface regions is advanced. The method is based on computer processing of triple-crystal X-ray diffractometry data. It has high spatial resolution ( approximately 10-2 mu m) and sensitivity to lattice parameter variation of the order of 10-7. Deformation profiles in distorted Si crystals are reconstructed.