Sputter Epitaxy of Transition Metal Nitrides: Advances in Superconductors, Semiconductors, and Ferroelectrics

In this review, the epitaxial growth of transition metal nitrides (TMNs) is explored, focusing on sputter epitaxy as a versatile method for developing advanced materials such as NbN superconductors and ScAlN ferroelectrics. In the recent studies, it is shown that, unlike conventional growth techniques, sputter epitaxy enables the deposition of high‐melting‐point transition metals, offering advantages for growing thin films with unique properties. In this review, recent progress in integrating TMNs with nitride semiconductors to fabricate hybrid devices that exhibit both superconducting and ferroelectric characteristics is addressed. These developments underscore the potential of sputter epitaxy as a foundational tool for advancing the next generation of electronic and quantum devices.