journal article·2024-09Open access

Gettering and Defect Engineering in Semiconductor Technology (GADEST 2024)

Johannes Heitmann, Franziska Beyer, Daniel Hiller, Teimuraz Mchedlidze, Matthias Müller

physica status solidi (a)· Volume 221· Issue 17

Abstract

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Research context

OpenAlex topics: Advanced Surface Polishing Techniques · Industrial Vision Systems and Defect Detection · Silicon and Solar Cell Technologies

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