Non-standard inversion method of ellipsometric equations for uniaxially anisotropic 2D materials on semiconductor or metallic substrates

Abstract A new analytic approach for solving the ellipsometric inversion problem for uniaxially anisotropic 2D materials has been developed. It is based on the classic point-by-point calculation method which treats the points of the spectrum independently, without correlation to other points. The method can be an efficient alternative to the common regression analysis in cases where the dispersion law of 2D materials has complex features. The important advantage of the method is that it does not require the initial guesses for anisotropic optical constants and the time taken for data processing is negligible. It is shown that the new technique is sensitive enough to determine the extraordinary dielectric constant of the monographene. The method offers significant practical interest since the anisotropic properties of 2D materials have not yet been explored.